28 research outputs found
Modern microwave methods in solid state inorganic materials chemistry: from fundamentals to manufacturing
No abstract available
Wet Etching Of Sputtered Tantalum Thin Films In Naoh And Koh Based Solutions
In this paper, a wet chemical etching technique to selectively etch tantalum thin film in sodium hydroxide and potassium hydroxide based solutions was developed. Tantalum thin films were deposited by a DC-magnetron sputtering technique on silica and yttria-stabilized zirconia (YSZ) substrates. After deposition, the films were etched in hot NaOH/H 2O 2 and KOH/H 2O 2 based solutions with Au/Cr film as a hard mask. The etch rate was studied as a function of temperature and concentration of the etchants. © Springer Science+Business Media, LLC 2006