57 research outputs found

    Study of Argon and Silicon Implantation Damage in Polycrystalline Silicon

    No full text

    Diffusion of Sb in (111) Silicon during  N 2 Heat‐Treatment

    No full text

    Effect of  NF 3 on the Direct Thermal Nitridation of Silicon

    No full text

    Diffusion of Boron in Silicon During  O 2 /  NF 3 Oxidation

    No full text

    Planar oxidation of strained silicon substrates

    No full text
    corecore