4 research outputs found
Process Modeling of Solid Source Phosphorus Diffusions Using SUPREM-III
Carborundum PH-1025 Solid Planar Diffusion Sources were used to perform a statistically designed diffusion matrix. The data taken from this matrix included junction depth, sheet resistance and transferred glass thickness. Modifications to the existing SUPREM-Ill diffusion model failed to produce good correlation between SUPREM-Ill and the experimental data
Conference of Microelectronic Research 1990
https://scholarworks.rit.edu/meec_archive/1003/thumbnail.jp