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2 research outputs found
A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS)
Author
Golta Khatibi
Michael Zehetbauer
Peyman Rafiee
Prime Faraday Partnership
Publication venue
'Emerald'
Publication date
Field of study
No full text
Crossref
Optimization of the batch production of silicon fiber-top MEMS devices
Author
Albri F
Beekmans S V
+13Â more
D Iannuzzi
Denisov A
J H Rector
Jansen H
Laconte J
Li J
M Slaman
Petrusis A
Pham N P
PRIME Faraday Partnership
R Verdoold
S V Beekmans
Saito T
Publication venue
'IOP Publishing'
Publication date
Field of study
No full text
Crossref