3D wire - a novel approach for 3D chips interconnection for harsh environment applications

MEMS sensor packaging is one of the key technologies in MEMS technology development, since it is a key step to turn MEMS product from research to application. Compared to the current technology used in MEMS device or system design and production, relatively backward packaging technology has become a bottleneck restricting the possibility for new MEMS products to enter the market. In order to achieve mass production of MEMS devices and to reduce the production cost of new MEMS products, design, process and reliability of the package must be taken into consideration at the early stage of the development. MEMS packaging technology is becoming equally important as the MEMS sensor itself. Therefore, research and development of low-cost, high-performance and high-density packaging technology have turned into an important issue in the field of MEMS. In this paper we discuss a new integration concept, using a novel plasma-based additive technology to reduce the fabrication cost and to realize an easy process flow. This study also demonstrates the capability for deposit interconnection layer in a high temperature piezoresistive sensor housing systems

Development of a Novel High Reliable Si-Based Trace Humidity Sensor Array for Aerospace and Process Industry

In this paper we present high reliable and accurate silicon-based trace humidity sensors for use in aerospace and process industry. The sensors have been realized by using simple MEMS technology in this work. One is a single sensor (sensor cell) for monitoring of humidity, and sensor array is able to measure the total trace humidity in the atmosphere. It’s very suitable for aerospace and process industry such pharmacy applications

Packaging solution for a novel silicon-based trace humidity sensor using coulometric method

For a large number of industrial, technical processes and in aerospace science, the monitoring and control of water content of solid, liquid, or gaseous materials is a central and quality determining task [1]. In this paper we present our work on development of a humidity sensor array for detecting of absolute trace humidity using Pt-P2O5 electrolytic cells. Many sensor solutions on the market are using this material system for detecting of humidity. Disadvantages of these systems are their non-ability to monitor the absolute amount of water in air and their limited robustness and redundancy. One of important focuses in this work is the development of a robust and stable package for the developed sensor system. The package has to protect the sensors from surrounding, but has to provide the interface between the sensor surface and the atmosphere and a sensor electrical interface for electronics. For a reliable detection of humidity in air, a constant and laminar flow over the sensor surface is needed. The system is containing 4 sensors (cells) in a row, which allows detection of total water in the air. Our realized sensor system shows a high reliable and accurate behavior and is suitable for use in aerospace and industry [2]