Sub-Threshold Fabrication of Laser-Induced Periodic Surface Structures on Diamond-like Nanocomposite Films with IR Femtosecond Pulses

In the paper, we study the formation of laser-induced periodic surface structures (LIPSS) on diamond-like nanocomposite (DLN) a-C:H:Si:O films during nanoscale ablation processing at low fluences—below the single-pulse graphitization and spallation thresholds—using an IR fs-laser (wavelength 1030 nm, pulse duration 320 fs, pulse repetition rate 100 kHz, scanning beam velocity 0.04–0.08 m/s). The studies are focused on microscopic analysis of the nanostructured DLN film surface at different stages of LIPSS formation and numerical modeling of surface plasmon polaritons in a thin graphitized surface layer. Important findings are concerned with (i) sub-threshold fabrication of high spatial frequency LIPSS (HSFL) and low spatial frequency LIPSS (LSFL) under negligible surface graphitization of hard DLN films, (ii) transition from the HSFL (periods of 140 ± 30 and 230 ± 40 nm) to LSFL (period of 830–900 nm) within a narrow fluence range of 0.21–0.32 J/cm2, (iii) visualization of equi-field lines by ablated nanoparticles at an initial stage of the LIPSS formation, providing proof of larger electric fields in the valleys and weaker fields at the ridges of a growing surface grating, (iv) influence of the thickness of a laser-excited glassy carbon (GC) layer on the period of surface plasmon polaritons excited in a three-layer system “air/GC layer/DLN film”

Picosecond-laser-induced structural modifications in the bulk of single-crystal diamond

Arrays of through laser-graphitized microstructureshavebeenfabricatedintypeIIasingle-crystal1.2-mmthick diamond plates by multipulse laser irradiation with 10-ps pulses at λ=532 nm wavelength. Raman and photoluminescence (PL) spectroscopy studies of the bulk microstructures have evidenced the diamond transformation to amorphous carbon and graphitic phases and the formation of radiation defects pronounced in the PL spectra as the self-interstitial related center, the 3H center, at 504 nm. It is found that the ultrafast-laser-induced structural modifications in the bulk of single-crystal diamond plates occur along{111}planes, known as the planes of the lowest cleavage energy and strength in diamond

Tribological Performance of Diamond-like Nanocomposite Coatings: Influence of Environments and Laser Surface Texturing

Diamond-like nanocomposite (DLN) films (a-C:H:Si:O films) are characterized by their unique structure and remarkable tribological properties to be pronounced under various environmental and surface modification conditions. In this paper, we investigated the effects of environments (humid air, water and oil lubrication, elevated temperatures) and laser surface texturing on tribological performance of DLN coatings. Femtosecond laser (wavelength 515 nm) was used for surface texturing. Comparative tests of DLN films sliding against different counterbodies (steel, Si3N4) in humid air and water demonstrated the low-friction and low-wear performance under water, in the absence of chemical interaction of water with the counterbody surface. The wear rates of the film and Si3N4 ball in water, 7.5 × 10−9 and 2.6 × 10−9 mm3/(Nm), were found to be considerably lower than the corresponding values 6.8 × 10−7 and 3.8 × 10−8 mm3/(Nm) in humid air, in spite of higher friction in water-lubricated sliding. Laser surface texturing of DLN films was performed to fabricate microcrater arrays, followed by tribological testing under oil lubrication at different temperatures, from 23 to 100 ◦C. The lubricated friction performance of laser-textured films was improved at both the room temperature and elevated temperatures. The friction coefficient was reduced from 0.1 (original film) to 0.083 for laser-textured film at room temperature, and then to 0.068 at 100 ◦C. The nano-/microfriction behavior of laser-structured surface characterized by lower friction forces than the original surface was demonstrated using friction force microscopy in ambient air. The obtained results demonstrate excellent tribological properties of DLN coatings in various environments, which can be further improved by femtosecond-laser-surface texturing

Femtosecond Laser-Induced Periodic Surface Structures in Titanium-Doped Diamond-like Nanocomposite Films: Effects of the Beam Polarization Rotation

We study the properties of laser-induced periodic surface structures (LIPSS) formed on titanium-doped diamond-like nanocomposite (DLN) a-C:H:Si:O films during ablation processing with linearly-polarized beams of a visible femtosecond laser (wavelength 515 nm, pulse duration 320 fs, pulse repetition rates 100 kHz-2 MHz, scanning beam velocity 0.05–1 m/s). The studies are focused on (i) laser ablation characteristics of Ti-DLN films at different pulse frequencies and constant fluence close to the ablation threshold, (ii) effects of the polarization angle rotation on the properties of low spatial frequency LIPSS (LSFL), and (iii) nanofriction properties of the ‘rotating’ LIPSS using atomic force microscopy (AFM) in a lateral force mode. It is found that (i) all LSFL are oriented perpendicular to the beam polarization direction, so being rotated with the beam polarization, and (ii) LSFL periods are gradually changed from 360 ± 5 nm for ripples parallel to the beam scanning direction to 420 ± 10 nm for ripples formed perpendicular to the beam scanning. The obtained results are discussed in the frame of the surface plasmon polaritons model of the LIPSS formation. Also, the findings of the nanoscale friction behavior, dependent on the LIPSS orientation relative to the AFM tip scanning direction, are presented and discussed

Sub-Threshold Fabrication of Laser-Induced Periodic Surface Structures on Diamond-like Nanocomposite Films with IR Femtosecond Pulses

In the paper, we study the formation of laser-induced periodic surface structures (LIPSS) on diamond-like nanocomposite (DLN) a-C:H:Si:O films during nanoscale ablation processing at low fluences—below the single-pulse graphitization and spallation thresholds—using an IR fs-laser (wavelength 1030 nm, pulse duration 320 fs, pulse repetition rate 100 kHz, scanning beam velocity 0.04–0.08 m/s). The studies are focused on microscopic analysis of the nanostructured DLN film surface at different stages of LIPSS formation and numerical modeling of surface plasmon polaritons in a thin graphitized surface layer. Important findings are concerned with (i) sub-threshold fabrication of high spatial frequency LIPSS (HSFL) and low spatial frequency LIPSS (LSFL) under negligible surface graphitization of hard DLN films, (ii) transition from the HSFL (periods of 140 ± 30 and 230 ± 40 nm) to LSFL (period of 830–900 nm) within a narrow fluence range of 0.21–0.32 J/cm2, (iii) visualization of equi-field lines by ablated nanoparticles at an initial stage of the LIPSS formation, providing proof of larger electric fields in the valleys and weaker fields at the ridges of a growing surface grating, (iv) influence of the thickness of a laser-excited glassy carbon (GC) layer on the period of surface plasmon polaritons excited in a three-layer system “air/GC layer/DLN film”

Femtosecond Laser-Induced Periodic Surface Structures in Titanium-Doped Diamond-like Nanocomposite Films: Effects of the Beam Polarization Rotation

We study the properties of laser-induced periodic surface structures (LIPSS) formed on titanium-doped diamond-like nanocomposite (DLN) a-C:H:Si:O films during ablation processing with linearly-polarized beams of a visible femtosecond laser (wavelength 515 nm, pulse duration 320 fs, pulse repetition rates 100 kHz-2 MHz, scanning beam velocity 0.05–1 m/s). The studies are focused on (i) laser ablation characteristics of Ti-DLN films at different pulse frequencies and constant fluence close to the ablation threshold, (ii) effects of the polarization angle rotation on the properties of low spatial frequency LIPSS (LSFL), and (iii) nanofriction properties of the ‘rotating’ LIPSS using atomic force microscopy (AFM) in a lateral force mode. It is found that (i) all LSFL are oriented perpendicular to the beam polarization direction, so being rotated with the beam polarization, and (ii) LSFL periods are gradually changed from 360 ± 5 nm for ripples parallel to the beam scanning direction to 420 ± 10 nm for ripples formed perpendicular to the beam scanning. The obtained results are discussed in the frame of the surface plasmon polaritons model of the LIPSS formation. Also, the findings of the nanoscale friction behavior, dependent on the LIPSS orientation relative to the AFM tip scanning direction, are presented and discussed

Machining of semiconductors and dielectrics with ultra-short pulses: Influence of the wavelength and pulse bursts (Conference Presentation)

n the burst mode the reported removal rates were often higher than the ones achieved with single pulses at identical repetition rate and average power. But this effect is mainly caused by the reduced energy per single pulse in the burst and the corresponding fluence which is then nearer its optimum value showing highest specific removal rate. But there exist special situations where the burst mode shows a higher efficiency and therefore an increased specific removal rate. For copper e.g. it was found that a 3-pulse burst with a time spacing of 12 ns at a wavelength of 1064 nm leads to an about 15% higher specific removal rate. We extended the burst investigations to semiconductors and isolators and measured the specific removal rate as a function of the applied peak fluence for different materials, number of pulses in the burst and time spacing. For 1064nm silicon e.g. shows a maximum specific removal rate which amounts about 1.7µm3/µJ for single pulses and a 2 pulse burst as well. Then it almost linearly increases up to about 5 µm3/µJ when the number of pulses in the burst is raised to 8. A similar effect is found for machining grooves into diamond-like nanocomposite films with single pulses and a 2- and 3-pulse burst, respectively. In contrast, for silicon and 532 nm wavelength where the photon energy exceeds the bandgap, only a small difference in the maximum specific removal was observed. Heat accumulation is assumed to cause the higher specific removal rates but further experiments are needed gain a clearer picture