Automatic detection of NIL defects using microscopy and image processing

International audienc

Characterization of imprinted gratings based on transparent materials by transmission scatterometry

International audienc

Phase control of reflection resonant grating for the lossless temporal shaping of femtosecond pulses

International audienceThe abrupt phase jump across resonance in a wide band mirror associated with a resonant grating can be used to shape the temporal profile of a femtosecond pulse. A phenomenological representation of resonant reflection is provided which permits a direct design of the structure achieving a prescribed temporal shape like for instance pulse splitting

Bridging pole and coupled wave formalisms for grating waveguide resonance analysis and design synthesis

International audienceThe algebraic polar expression of resonant reflection from a grating waveguide excited by a free space wave is formulated in terms of the physically meaningful phenomenological parameters of the coupled wave formalism. The reflection coefficient is simply represented as a circle in the complex plane which sheds light on the behaviour of the modulus and phase of anomalous reflection. Analytical expressions are derived for the phenomenological parameters that can now be calculated from optogeometrical quantities which are simple to measure. The relevance and usefulness of bridging the two formalisms is shown in the example of the design of an evanescent wave biosensor

Dimensional characterization of biperiodic imprinted structures using optical scatterometry

International audienc

Impedance-meter characterization of integrated magnetic planar devices at low frequencies for low power application

International audienc

Scatterometry analysis of sequentially imprinted patterns: influence of thermal parameters

International audienc

A method to determine winding losses in integrated inductors and separate skin and proximity effects

International audienc