21 research outputs found

    Characterisation of C–F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL 2

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    C–F polymer redeposition is generated on the etched sidewall of the patterned air-bearing surface (ABS). This C–F polymer is a by-product from fluorine-based plasma using a Surface Technology Systems multiplex-pro air-bearing etch (ABE). The morphology of the re-deposition and the composite element was observed by a scanning electron microscope (SEM). The chemical bonding results were characterised via X-ray photoelectron spectroscopy, attenuated total reflected infrared spectroscopy and visible Raman spectroscopy. The purpose of this work is to demonstrate a modification of AlF3 re-deposition to C–F polymer re-deposition, which is easily stripped out by an isopropyl alcohol-based solution. The benefit of this research is the removal of the re-deposition in the resist strip process without additional cleaning process steps

    Apatite Formation on Rutile TiO2 Film Deposited Using Dual Cathode DC Unbalanced Magnetron Sputtering

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    Rutile TiO2 films were deposited on unheated stainless steel type 316L using dual cathode DC unbalanced magnetron sputtering. The effects of deposition time ranging 30, 60, 90, and 120 mins on the films structure were investigated. Moreover, all the samples were immersed in SBF for period times of 3 and 5 days also considered. The crystal structures were characterized by thin film X-ray diffraction (TF-XRD). The film’s thickness and surface morphology were evaluated using atomic force microscopy (AFM). The crystallinity, roughness, thickness, and grain size of rutile with only (110) plane increased with increased deposition time. After immersed samples in SBF for 3 day the highest and moderate crystallinity of apatite was observed on the 30 min and 90 min, respectively. However, the films deposited with 60 and 120 min cannot be observed the peak of apatite. An increase crystallinity of apatite clearly observed when after immersed in SBF for 5 day

    Structure of Titanium Nitride Coatings on Stainless Steel 304

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    ABSTRACT The microstructure of TiN films deposited by magnetron sputtering are related to their properties and deposition conditions. The transition from porous to compact films and the change in their microhardness, lettice parameters and gas pressure and energy of ion bombardment. The extended crystallographic anisotropy of inhomogeneous lattice deformations is a new phenomenon in which thin polycrystalline films differ from bulk stress-free materials

    Synthesis of Antibodies-Conjugated Fluorescent Dye-Doped Silica Nanoparticles for a Rapid Single Step Detection of Campylobacter jejuni

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    The preparation of antibodies-conjugated fluorescent dye-doped silica nanoparticles (FDS-NPs) was developed to detect Campylobacter jejuni cells under a fluorescence microscope. The particles prepared by sol-gel microemulsion techniques have a round shape with an average size of 43 ± 4 nm. They were highly photo stable and could emit strong orange fluorescent for 60 min. Both amine- and carboxyl-functionalized properties were evident from FTIR and FT Raman spectra. The FDS-NPs conjugated with antibodies against C. jejuni were well dispersed in PBS solution at 20 mM of NaCl. The conjugation with monoclonal antibodies against C. jejuni was successful. The direct observation of the antibodies-conjugated FDS-NPs- that bounds C. jejuni with Petroff Hausser counting chamber at 40x was clear. The different focus lengths clearly separated bound and unbound FDS-NPs under the microscope. We successfully synthesis the bio-conjugated dye doped silica nanoparticles for C. jejuni that are easy to use and giving clear detection in due time

    Preparation and Characterization of Alumina Nanoparticles in Deionized Water Using Laser Ablation Technique

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    Al2O3 nanoparticles were synthesized using laser ablation of an aluminum (Al) target in deionized water. Nd:YAG laser, emitted the light at a wavelength of 1064 nm, was used as a light source. The laser ablation was carried out at different energies of 1, 3, and 5 J. The structure of ablated Al particles suspended in deionized water was investigated using X-ray diffraction (XRD). The XRD patterns revealed that the ablated Al particles transformed into γ-Al2O3. The morphology of nanoparticles was investigated by field emission scanning electron microscopy (FE-SEM). The FE-SEM images showed that most of the nanoparticles obtained from all the ablated laser energies have spherical shape with a particle size of less than 100 nm. Furthermore, it was observed that the particle size increased with increasing the laser energy. The absorption spectra of Al2O3 nanoparticles suspended in deionized water were recorded at room temperature using UV-visible spectroscopy. The absorption spectra show a strong peak at 210 nmarising from the presence of Al2O3 nanoparticles. The results on absorption spectra are in good agreement with those investigated by XRD which confirmed the formation of Al2O3 nanoparticles during the laser ablation of Al target in deionized water

    Theoretical investigation of a low-voltage Ge/SiGe multiple quantum wells optical modulator operating at 1310 nm integrated with Si3N4 waveguides

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    We report on the design and simulation using 3D-FDTD simulation of Si3N4-integrated Ge/SiGe multiple quantum wells (MQWs) optical modulators at the optical wavelength of 1310 nm. The effect of fabrication tolerance and wavelength dependence on the optical coupling performance between the Si3N4 waveguide and the Ge/SiGe MQWs structure as well as the optical modulation performance are reported. The results show that Si3N4-waveguide-integrated Ge/SiGe MQWs optical modulators can attain several key performance requirements in terms of extinction ratio, insertion loss, driving voltage, and fabrication variations with a compact footprint favorable for short-range optical interconnect applications

    Physical Properties and Selective CO Oxidation of Coprecipitated CuO/CeO2 Catalysts Depending on the CuO in the Samples

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    This paper investigates the effects of CuO contents in the CuO-CeO2 catalysts to the variation in physical properties of CuO/CeO2 catalysts and correlates them to their catalytic activities on selective CO oxidation. The characteristic of crystallites were revealed by X-ray diffraction, and their morphological developments were examined with TEM, SEM, and BET methods. Catalytic performance of catalysts was investigated in the temperature range of 90–240°C. The results showed that the catalyst was optimized at CuO loading of 20 wt.%. This was due to the high dispersion of CuO, high specific surface area, small crystallite sizes, and low degree of CuO agglomeration. Complete CO conversion with near 100% selectivity was achieved at a temperature below 120°C. The optimal performance was seen as a balance between CuO content and dispersion observed with growth, morphology, and agglomeration of nanostructures

    Growth of MWCNTs on Flexible Stainless Steels without Additional Catalysts

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    Multiwalled carbon nanotubes (MWCNTs) were synthesized on austenitic stainless steel foils (Type 304) using a home-built thermal chemical vapor deposition (CVD) under atmospheric pressure of hydrogen (H2) and acetylene (C2H2). During the growth, the stainless steel substrates were heated at different temperatures of 600, 700, 800, and 900°C. It was found that MWCNTs were grown on the stainless steel substrates heated at 600, 700, and 800°C while amorphous carbon film was grown at 900°C. The diameters of MWCNTs, as identified by scanning electron microscope (SEM) images together with ImageJ software program, were found to be 67.7, 43.0, and 33.1 nm, respectively. The crystallinity of MWCNTs was investigated by an X-ray diffractometer. The number of graphitic walled layers and the inner diameter of MWCNTs were investigated using a transmission electron microscope (TEM). The occurrence of Fe3O4 nanoparticles associated with carbon element can be used to reveal the behavior of Fe in stainless steel as catalyst. Raman spectroscopy was used to confirm the growth and quality of MWCNTs. The results obtained in this work showed that the optimum heated stainless steel substrate temperature for the growth of effective MWCNTs is 700°C. Chemical states of MWCNTs were investigated by X-ray photoelectron spectroscopy (XPS) using synchrotron light

    Growth and Characterization of Nanostructured TiCrN Films Prepared by DC Magnetron Cosputtering

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    Nanostructured TiCrN films were grown on Si (100) wafers by reactive DC unbalanced magnetron cosputtering technique without external heating and voltage biasing to the substrates. The effects of Ti sputtering current on the chemical composition, chemical state, electronic structure, crystal structure, and morphology of the TiCrN films were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscopy (AFM), and field emission scanning electron microscopy (FE-SEM), respectively. The results showed that all prepared films were formed as an understoichiometric (Ti, Cr)N solid solution with the fcc B1 type phase. The films exhibited a nanostructure with a crystallite size of less than 14 nm. The deconvolution of XPS spectra revealed the chemical bonding between Ti, Cr, N, and O elements. The addition of Ti contents led to the decrease of valence electrons filled in the d conduction bands which result in the change of binding energy of electrons in core levels. The roughness of the films was found to increase with increasing ITi. The cross-sectional morphology of the films showed columnar structure with dome tops
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