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2 research outputs found
Spray coating of photoresist for pattern transfer on high topography surfaces
Author
Beach W F
Joachim N Burghartz
+7 more
Kutchoukow V G Mollinger J R Bossche A
Linder S Baltes H Gnaedinger F Doering E
Nga P Pham
Parodi M
Pasqualina M Sarro
Pham N P Sarro P M Burghartz J N
Pham N P Sarro P M Burghartz J N
Publication venue
'IOP Publishing'
Publication date
Field of study
Full text link
Crossref
Liquid phase deposition of polymers on arbitrary shaped surfaces and their suitability for e-beam patterning
Author
+14 more
B Päivänranta
Daly D
H-P Herzig
K Leinonen
Karlsson M
Klein L C
Lathi B P
M Kuittinen
M Pudas
O Pitkänen
P-Y Baroni
Pham N P Boellard E Sarro P M Burghartz J N
T Scharf
Tseng A A
Publication venue
'IOP Publishing'
Publication date
Field of study
No full text
Crossref