15 research outputs found

    Developments in metrology in support of nanotechnology

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    Nanotechnology emerges out of fundamental science through capability for accurate, repeatable and reproducible measurements on the nanoscale which allows scientists and engineers to accumulate knowledge. Understanding the measurement science is the first step towards development of new ideas. This paper describes some research initiatives which underpin the development of nanotechnology. Programs underway at the National Research Council of Canada include: development of metrological scanning-probe microscope instrumentation for dimensional calibration, materials characterization, development of artefacts designed specifically for dimensional calibration, investigation of metrology for application to soft materials and investigation of intrinsic length standards for realization of the SI metre at the nanoscale.Peer reviewed: YesNRC publication: Ye

    Increasing the range of unambiguity in step-height measurement using multiple-wavelength interferometry \u2014 application to absolute long gauge block measurement

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    An instrument for step-height measurement by multiple-wavelength interferometry is described. The addition of a 1152-nm wavelength to a multiple-wavelength scheme applying wavelengths of 633, 612, and 543 nm relaxes the tolerance range of the required preliminary measurement to \ub1140 \u3bcm, if the total uncertainty in the fringe fraction measurement can be kept below 2%. For larger fringe fraction measurement uncertainty, numerical simulations show that the integer number of interference orders can still be determined unambiguously if the range in the preliminary knowledge of the length has been correspondingly reduced. The interferometer instrument is described, and experimental data are presented in the context of long gauge block calibration at the National Research Council of Canada.NRC publication: Ye
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