31 research outputs found
Selecting Metal Alloy Electric Contact Materials for MEMS Switches
Get PDFThis paper presents a method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This procedure consists of reviewing macro-switch lessons learned, utilizing equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact resistance performance. After determining a candidate alloy material, MEMS switches were designed, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 Ω were measured for micro-switches with gold (Au) and gold–platinum (Au–(6.3%)Pt) alloy electric contacts, respectively. In addition, \u27hot-switched\u27 life cycle test results of 1.02 × 108 and 2.70 × 108 cycles were collected for micro-switches with Au and Au–(6.3%)Pt contacts, respectively. These results indicate increased wear with a small increase in contact resistance for MEMS switches with metal alloy electric contacts
Radio Frequency MEMS Switch Contact Metal Selection
Get PDFA method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, `hot-switched` life cycle test results of 1.02.x108 and 2.70.x108 cycles may be realized for micro-switches with Au and Au-(6.3 at %)Pt contacts. These results indicate increased wear with a small increase in contact resistance for MEMS switches with metal alloy electric contacts
Practical research : planning and design
No full textWritten in uncommonly engaging and elegant prose, Practical Research: Planning and Design is a do-it-yourself, understand-it-yourself manual designed to help students in any discipline understand the fundamental structure of quality research and the methodical process that leads to valid and reliable results. The authors emphasize two things: 1) that quality research demands planning and design; and, 2) how research projects can be executed effectively and professionally. This text guides the reader, step-by-step, from the selection of a problem, through the process of conducting authentic research, to the preparation of a completed report, with practical suggestions based on a solid theoretical framework and sound pedagogy. With broad coverage applicable to any discipline, Practical Research is valuable to students planning to conduct their own research projects as well as to anyone wanting to participate in thoughtful, methodical evaluation of published research reports
