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μ€λ¦¬μ½ μΉ΄λ°μ΄λμ λν CO2 λ μ΄μ μ°λ§μ ν¨κ³Ό
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Όλ¬Έ(μμ¬)--μμΈλνκ΅ λνμ :곡과λν κΈ°κ³ν곡곡νλΆ,2019. 8. μμ±ν.μ€λ¦¬μ½ μΉ΄λ°μ΄λ (SiC)λ μΌλ°μ μΌλ‘ μ¬μ©λλ λ€λ₯Έ μ 리 λ° κΈμλ³΄λ€ λ§μ μ₯μ μ μ 곡νκΈ° λλ¬Έμ μ€λ«λμ κ³ μ±λ₯ κ΄ν μμ© λΆμΌμμ μ°μν μ¬λ£λ‘ μΈμ λ°κ³ μλ€. SiCμ μ°μν νΉμ± μ€ μΌλΆλ λ§€μ° λμ κ³ μ κ°μ± (E / Ο), λμ μ΄ μ λμ± λ° λ°μ΄λ μΉμ μμ μ±μ ν¬ν¨νλ€.
μ€λ¦¬μ½ μΉ΄λ°μ΄λμ λν CO2 λ μ΄μ μ°λ§μ λ μ΄μ μ 곡ꡬ κ²½λ‘μ ν¨κ³Όκ° μ‘°μ¬νλ€. μ΄ νμ΄λΈλ¦¬λ κ³Όμ μλ λ¨Όμ μνλ ν¨ν΄μ λ μ΄μ ν¬λμ λλ€. μ΄μ΄μ, λ μ΄μ 보쑰 μ°λ§κ° λμΌν 곡ꡬ κ²½λ‘μμ μνλλ€. νλ©΄μ λ μ΄μ μ λ ν¬λμ΄ μλ μμκ³Ό ν¬λμ΄ μλ μμμμ λ¬Όμ§ μ κ±°μ μμ΄ λλ ·ν μ°¨μ΄λ₯Ό 보μλ€.. μ΄λ¬ν λ¬Όμ§ μ κ±°μ λμ μ°¨μ΄λ 맀ν¬λ‘ λ° λ―ΈμΈ ν¨ν΄μ κ°κ³΅νκΈ° μν΄μ μ¬μ©λμλ€. νμ 2 mmμμ 200 ΞΌmκΉμ§, κ·Έλ¦¬κ³ κΉμ΄λ 5 ΞΌmμμ 20 ΞΌmκΉμ§ νμ΄ μ±κ³΅μ μΌλ‘ μμ±λμλ€. λν, μ΄ νμ΄λΈλ¦¬λ κ³Όμ μ λμ€μ Newtonian λ§μκ²½μ μΌλΆλ‘ μ¬μ©λλ ꡬν μ€λͺ© κ±°μΈμ κ°κ³΅νλ λ° μ¬μ©λλ€.Silicon carbide (SiC) has long been recognized as an excellent material for high performance optical applications because it offers many advantages over other commonly used glasses and metals. Some of the superior attributes of SiC include extremely high specific stiffness (E/Ο), high thermal conductivity and outstanding dimensional stability.
The effect of and CO2 laser and its tool path on silicon carbide (SiC) were investigated. The process started by creating Laser induced cracks on the desired pattern. Subsequently, laser assisted polishing was conducted on the same tool path. The surface showed a sharp difference in material removal in the areas with laser induced cracks and in areas with no cracks. This high difference in material removal was used to generate macro and micro patterns. Grooves from 2mm to 200ΞΌm in width and 5ΞΌm to 20ΞΌm depth were successfully generated. Moreover, this process was used to machine a spherical concave mirror that was later used as part of a Newtonian telescope.Chapter 1. Introduction 1
1.1 Purpose of Research 1
1.2 Surface Texture on Ceramics 3
1.2 Hybrid Machining Processes 3
Chapter 2. Experiment Set up 5
2.1 Hardware Set-Up 5
Chapter 3. Material Removal Rate 7
3.1 CO2 Laser Generated Cracks 7
3.2 Experiment Design 9
3.3 Material Removal Measurement and Results 12
Chapter 4. Macro/Micro Channels 17
4.1 Macro/Micro Channels Design 17
4.2 Tool Size Effect 19
4.3 Variable Width Channel 20
4.4 Tool Path Effect 22
Chapter 5. Newtonian Telescope 25
5.1 Mirror Design and Fabrication 25
5.2 Newtonian Telescope 28
Chapter 6. Conclusion 31
Bibliography 32
Abstract in Korean 34Maste