High-Density 3-D Capacitors for Power Systems On-Chip: Evaluation of a Technology Based on Silicon Submicrometer Pore Arrays Formed by Electrochemical Etching

International audienceThis paper presents the state of the art technologies currently used to produce high density integrated capacitors for power systems on-chip applications. The use of high-k dielectrics and 3D patterning of silicon for reaching high specific capacitance is reviewed. Integrating capacitors monolithically on the active chip or in package of power systems is discussed and solutions are proposed for minimising series resistance and achieving a high level of integration. A technology based on nanolithography and silicon electrochemical etching is then detailed. It is shown that capacitance densities of up to 700 nF/mm² can be obtained with a submicrometer pores array in a relatively limited thickness. The advantages and disadvantages of further decreasing the pore size to nanosize pores (below 100 nm) are discussed

Electrokinetic Biomolecule Preconcentration Using Xurography-Based Micro-Nano-Micro Fluidic Devices

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Formation of 300 nm period pore arrays by laser interference lithography and electrochemical etching

International audienceThis paper highlights that combining laser interference lithography and electrochemical etching is a cost-effective, efficient method to realize periodic nanopore arrays in silicon with lattice pitch as small as 300 nm on centimeter-scale substrates. The fabrication of wide-area and high aspect ratio 2D pore arrays with 250 nm diameter and 5 mu m depth is demonstrated. All the steps of the process have been optimized to achieve vertical sidewalls with 50 nm thickness, providing pore arrays with aspect ratio of 100 on n-type silicon substrates over an area of 2 x 2 cm(2). These results constitute a technological advance in the realization of ordered pore arrays in silicon with very small lattice parameters, with impact in biotechnology, energy harvesting, or sensors. (C) 2015 AIP Publishing LLC

ASEAN's external agreements : law, practice and the quest for collective action

ASEAN is coming of age as an international actor and international treaty-maker. To date, more than two hundred external agreements and other instruments have been concluded in the name of ASEAN. This book provides the first systematic account of the legal framework governing ASEAN's burgeoning external relations practice. It focuses in depth on ASEAN's wide-ranging mandate to promote its values and principles in the wider region and beyond, as well as the highly intergovernmental, and at times haphazard, handling of the bloc's relations with the outside world. Furthermore, it reveals that there are two basic meanings of ASEAN in its international dealings, which have important implications under international law: ASEAN as an international organisation with its own legal personality and ASEAN as the collectivity of its member states.1. Introduction 2. The legal and institutional framework for ASEAN external agreements: the centrality of ASEAN 3. An inventory and typology of ASEAN external instruments: overview and trends 4. ASEAN as a contracting party 5. Beyond market access? The anatomy of ASEAN's preferential trade agreements 6. A regional strategy: a typology of ASEAN partnership and co-operation agreements 7. Between great-power rivalries and supranationality: ASEAN external instruments and regional hedging strategies -- Executive summary -- Appendices -- Index

Analytic modeling of breakdown voltage shift in the CMOS buried multiple junction detector

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Charge injection in dielectric films during electrowetting actuation under direct current voltage

International audienceElectrowetting-on-dielectric technology suffers from a lack of accuracy and reliability under DC voltage. The root of this phenomenon is related to charge injection within dielectric materials polarized and in contact with electrolytes. Correlation between contact angle measurements and transient current is used to investigate electrowetting stability under DC voltage. In particular, nature of ionic species and polarization effect are scrutinized. Asymmetric mechanisms appear between positive and negative polarizations from both wetting stability and leakage current, attributed to charge injection and allowing electrets-type actuation. A first occurrence of large amplitude reverse electrowetting is also observed. (C) 2015 Elsevier B.V. All rights reserved

Microsystèmes de séparation électrophorétique en PDMS avec détection de fluorescence par fibres optiques intégrées application à la séparation d’aminoacides

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Microsystèmes de séparation électrophorétique en PDMS avec détection de fluorescence par fibres optiques intégrées application à la séparation d’aminoacides

Une des promesses les plus attrayantes de la microfluidique est la réalisation de « Lab-on-chip », dispositifs permettant de regrouper sur une seule puce l’ensemble des fonctions d’un laboratoire de chimie analytique conventionnel : le mélange, la préconcentration, la séparation, la quantification, le stockage, etc. Ainsi, à terme, les analyses deviendront portables, plus rapides, moins chères et plus flexibles. Cet article présente la réalisation d’un microsystème permettant dans un premier temps la séparation et la détection de molécules biologique en solution. Il y est présenté la méthode de séparation mise en œuvre ici, la fabrication de cette puce, la détection des molécules séparées, ainsi que les premiers résultats obtenus

Novel concept of a low-power high-volume microfluidic actuator: theory of operation and experimental characterization

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