800 research outputs found

    Highly conductive Sb-doped layers in strained Si

    Get PDF
    The ability to create stable, highly conductive ultrashallow doped regions is a key requirement for future silicon-based devices. It is shown that biaxial tensile strain reduces the sheet resistance of highly doped n-type layers created by Sb or As implantation. The improvement is stronger with Sb, leading to a reversal in the relative doping efficiency of these n-type impurities. For Sb, the primary effect is a strong enhancement of activation as a function of tensile strain. At low processing temperatures, 0.7% strain more than doubles Sb activation, while enabling the formation of stable, ~10-nm-deep junctions. This makes Sb an interesting alternative to As for ultrashallow junctions in strain-engineered complementary metal-oxide-semiconductor device

    Modeling thermal and mechanical cancellation of residual stress from hybrid additive manufacturing by laser peening

    Get PDF
    Additive manufacturing (AM) of metals often results in parts with unfavorable mechanical properties. Laser peening (LP) is a high strain rate mechanical surface treatment that hammers a workpiece and induces favorable mechanical properties. Peening strain hardens a surface and imparts compressive residual stresses improving the mechanical properties of a material. This work investigates the role of LP on layer-by-layer processing of 3D printed metals using finite element analysis. The objective is to understand temporal and spatial residual stress development after thermal and mechanical cancellation caused by cyclically coupling printing and peening. Results indicate layer peening frequency is a critical process parameter affecting residual stress redistribution and highly interdependent on the heat generated by the printing process. Optimum hybrid process conditions were found to exists that favorably enhance mechanical properties. With this study, hybrid-AM has ushered in the next evolutionary step in AM and has the potential to profoundly change the way high value metal goods are manufactured

    An effective electrical isolation scheme by iron implantation at different substrate temperatures

    Get PDF
    High-energy implantation of iron in n-type doped InP epilayers at different substrate temperatures: 77K, room temperature (RT), 100degreesC and 200degreesC was investigated to study the electrical isolation of n-type InP. Iron isolation implants were performed at 1MeV with a fluence of 5 x 10(14) /cm(2). This isolation scheme was chosen to place most of the iron atoms well inside the n-type doped layer. The sheet resistivity (R,), sheet carrier concentration (n(S)) and sheet mobility (p) were measured as a function of substrate temperature and post-implantation annealing temperature (100 - 800degreesC). Samples implanted at 77K, RT and 100degreesC show more or less the same trend of postimplant annealing characteristics. A maximum sheet resistivity of similar to1 x 10(7) Omega/rectangle was achieved for samples implanted at 77K, RT and 100degreesC after annealing at 400degreesC. A lower resistivity of similar to1 x 10(6) Omega/rectangle was obtained for a 200degreesC implant after annealing at 4000C. Lower damage accumulation due to enhanced dynamic annealing is observed for the highest implantation temperature. For 200degreesC substrate temperature, annealing above 4000C resulted in a gradual decrease in sheet resistivity to a value close to that of the starting material. But this is not the case for the lower substrate temperatures. The sheet resistivity was increased again for 77K, RT and 100()C implant after annealing at 600degreesC. We infer that for 77K, RT and 100degreesC implantation temperatures, the electrical isolation is due to a product of both damage related centers and defects related to the presence of Fe whereas for 200degreesC substrate temperature, we infer that only damage induced compensation removes the carriers. These results show the importance of iron implants as a device isolation scheme.</p

    Mechanical Characterizations of 3D-printed PLLA/Steel Particle Composites

    Get PDF
    The objective of this study is to characterize the micromechanical properties of poly-L-lactic acid (PLLA) composites reinforced by grade 420 stainless steel (SS) particles with a specific focus on the interphase properties. The specimens were manufactured using 3D printing techniques due to its many benefits, including high accuracy, cost effectiveness and customized geometry. The adopted fused filament fabrication resulted in a thin interphase layer with an average thickness of 3 μm. The mechanical properties of each phase, as well as the interphase, were characterized by nanoindentation tests. The effect of matrix degradation, i.e., imperfect bonding, on the elastic modulus of the composite was further examined by a representative volume element (RVE) model. The results showed that the interphase layer provided a smooth transition of elastic modulus from steel particles to the polymeric matrix. A 10% volume fraction of steel particles could enhance the elastic modulus of PLLA polymer by 31%. In addition, steel particles took 37% to 59% of the applied load with respect to the particle volume fraction. We found that degradation of the interphase reduced the elastic modulus of the composite by 70% and 7% under tensile and compressive loads, respectively. The shear modulus of the composite with 10% particles decreased by 36%, i.e., lower than pure PLLA, when debonding occurred

    Pulsed Laser Cutting of Magnesium-Calcium for Biodegradable Stents

    Get PDF
    There is growing interests in the use of biodegradable magnesium implants for cardiovascular and pulmonary applications such as stents. Magnesium is a metal that has the ability to gradually dissolve and absorb into the human body after implantation. There is very little work discussing the relationship between process parameters and cut quality of magnesium stents by laser cutting. The objective of this research is to determine the effect of laser cutting conditions including peak laser power and cutting speed of a millisecond range pulsed laser on kerf geometry, surface topography, surface roughness, and microstructure. An assessment on the experimental work discussing laser cutting of magnesium alloys is also presented
    corecore