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1 research outputs found
Via resistance reduction using "cool" PVD-Ta processing
Author
Hsia L.C.
Li K.
+9 more
Liew S.L.
Osiposwicz T.
Seet C.S.
Seng H.L.
Sudijono J.
Tan J.B.
Yong C.
Zeng H.C.
Zhang B.C.
Publication venue
'The Electrochemical Society'
Publication date
01/12/2003
Field of study
No full text
10.1149/1.1621417Journal of the Electrochemical Society15012G766-G770JESO
ScholarBank@NUS
No full text
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