6 research outputs found
Benzoylpivaloylmethanide precursors for the chemical beam epitaxy of oxide thin films:1. Synthesis, characterization, and use of yttrium benzoylpivaloylmethanide
The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y2O3 (001) thin films on SrTiO3 (001) substrates. </p