О ТЕХНОЛОГИЯХ РЕНТГЕНОВСКИХ СИСТЕМ ДЛЯ КОНТРОЛЯ ЭЛЕКТРОННЫХ КОМПОНЕНТОВ

Introduction. X-ray methods are currently widely used in manufacturing of various products and components of the electronics industry, including micro- and nano-electronics. One of the most informative and illustrative methods is projection X-ray microscopy. Specialized X-ray systems for process control are developed and used in industry. The key element in the design of an X-ray inspection system is an X-ray tube. In the overwhelming majority of cases, X-ray inspection systems are based on collapsible microfocus x-ray tubes with constant pumping. This greatly complicates the design of the installation, increases its dimensions, weight and cost. Objective. Analysis of possible technical and technological solutions that improve the availability of the X-ray system for monitoring of electronic components while maintaining the information content of the control. Materials and methods. The article presents the results of analytical studies of assessment of the degree of influence of the main parameters of the X-ray tube – the size of the focal spot and the focal length – on the resolution of the resulting X-ray images. The advantages and disadvantages of two variants of the construction of the X-ray inspection systems are described: based on collapsible and based on sealed X-ray tubes. The dependence of the size of the focal spot on the voltage on the X-ray tube and on the power supplied by the electron beam to the target of the X-ray tube is analyzed. It is shown that sealed (from a vacuum pumping system) micro focus X-ray tubes can be successfully used as a radiation source in installations for X-ray inspection. It is concluded that in most cases, sealed tubes are more practical. Results. In solving of most problems of non-destructive testing of electronic components in the composition of the Xray system, X-ray sources based on sealed X-ray tubes can be successfully used. Due to this, dimensions, weight, and the cost of an X-ray system for monitoring of electronic components are substantially reduced. Conclusion. Sealed X-ray tubes are an effective alternative in the development of an X-ray system for monitoring of electronic components, which enables to fundamentally increase the availability of such a system.Введение. Рентгенографические методы широко распространены в настоящее время при производстве различных изделий и компонентов электронной промышленности, в том числе микро- и наноэлектроники. Одним из наиболее информативных и наглядных методов является проекционная рентгеновская микроскопия. Разработаны и используются в промышленности специализированные рентгеновские системы для технологического контроля. Ключевым элементом конструкции системы рентгеновского контроля (СРК) является рентгеновская трубка. В подавляющем большинстве случаев СРК построены на основе разборных микрофокусных рентгеновских трубок с постоянной откачкой. Это существенно усложняет конструкцию установки, увеличивает ее габариты, массу и стоимость. Цель работы. Анализ возможных технических и технологических решений, позволяющих повысить доступность рентгеновской системы для контроля электронных компонентов при сохранении информативности контроля. Материалы и методы. Представлены результаты аналитических исследований оценки степени влияния основных параметров рентгеновской трубки – размера фокусного пятна и фокусного расстояния – на разрешающую способность получаемых рентгеновских изображений. Описаны достоинства и недостатки двух вариантов конструкции СРК: на основе разборных и отпаянных от вакуумной откачной системы рентгеновских трубок. Проанализированы зависимости размеров фокусного пятна от напряжения на рентгеновской трубке и от мощности, подводимой электронным пучком к мишени рентгеновской трубки. Показано, что отпаянные микрофокусные рентгеновские трубки могут быть с успехом использованы в качестве источника излучения в установках для рентгенографического контроля. Сделан вывод о том, что в большинстве случаев отпаянные трубки более практичны. Результаты. При решении большинства задач по неразрушающему контролю электронных компонентов в составе рентгеновской системы с успехом могут быть использованы источники рентгеновского излучения на основе отпаянных рентгеновских трубок. Благодаря этому существенно уменьшаются габариты, масса, а также стоимость рентгеновской системы контроля электронных компонентов. Заключение. Отпаянные рентгеновские трубки могут служить эффективной альтернативой при разработке рентгеновской системы контроля электронных компонентов, позволяющей принципиально повысить доступность такой системы

ABOUT TECHNOLOGIES OF X-RAY SYSTEMS FOR CONTROL OF ELECTRONIC COMPONENTS

Introduction. X-ray methods are currently widely used in manufacturing of various products and components of the electronics industry, including micro- and nano-electronics. One of the most informative and illustrative methods is projection X-ray microscopy. Specialized X-ray systems for process control are developed and used in industry. The key element in the design of an X-ray inspection system is an X-ray tube. In the overwhelming majority of cases, X-ray inspection systems are based on collapsible microfocus x-ray tubes with constant pumping. This greatly complicates the design of the installation, increases its dimensions, weight and cost. Objective. Analysis of possible technical and technological solutions that improve the availability of the X-ray system for monitoring of electronic components while maintaining the information content of the control. Materials and methods. The article presents the results of analytical studies of assessment of the degree of influence of the main parameters of the X-ray tube – the size of the focal spot and the focal length – on the resolution of the resulting X-ray images. The advantages and disadvantages of two variants of the construction of the X-ray inspection systems are described: based on collapsible and based on sealed X-ray tubes. The dependence of the size of the focal spot on the voltage on the X-ray tube and on the power supplied by the electron beam to the target of the X-ray tube is analyzed. It is shown that sealed (from a vacuum pumping system) micro focus X-ray tubes can be successfully used as a radiation source in installations for X-ray inspection. It is concluded that in most cases, sealed tubes are more practical. Results. In solving of most problems of non-destructive testing of electronic components in the composition of the Xray system, X-ray sources based on sealed X-ray tubes can be successfully used. Due to this, dimensions, weight, and the cost of an X-ray system for monitoring of electronic components are substantially reduced. Conclusion. Sealed X-ray tubes are an effective alternative in the development of an X-ray system for monitoring of electronic components, which enables to fundamentally increase the availability of such a system