Cross-Sections and Transport Properties of F- Ions in F-2

We present the new results for the simple scattering cross-section set and proposed transport coefficients for F- ions in F-2 that can be used in such models. Nanbu's theory based on thermodynamic threshold energies and separating elastic and reactive collisions is used to calculate cross-sections for binary collisions of ions with atoms and molecules. Direct MC method is applied to obtain swarm parameters at temperature of T = 300 K

Transport of F- ions in gaseous environment for technological applications

Negativni halogeni joni su zastupljeni u različitim neravnotežnim plazmama koje su zastupljene u biomedicinskim uređajima, nanotehnologijama, električnim pražnjenjima i hemiji atmosfere. Prikazani su podaci za modelovanje niskotemperaturnih plazmi koje sadrže F- jone primenom globalnih i drugih plazma modela. Ovaj jon je izabran zbog svoje izuzetno velike elektronegativnosti, veoma je jak nukleofilni reagent i formira veoma jake veze sa Luisovim kiselinama u gasnoj fazi. Sa druge strane, neizbežan je u proizvodnji c-BN filmova. Efikasni preseci za rasejanje F- jona na atomima Ar i molekulima F2, CF4 i BF3 dobijeni su primenom Nanbuove teorije u kojoj je moguće razdvojiti elastične od reaktivnih sudarnih procesa. Kako bi se uočili efekti nekonzervativnih sudarnih procesa na brzine drifta, proračuni su rađeni do visokih vrednosti E/N (1000Td).In this work we present swarm data obtained for F- ions in atomic and molecular gases necessary to form the global models for the complex collisional plasmas. We also present the new results for the simple scattering cross section set and proposed transport coefficients for F- ions in BF3 that can be used in such models. Nanbu’s theory based on thermodynamic threshold energies and separating elastic and reactive collisions is used to calculate cross sections for binary collisions of ions with atoms and molecules. For the cases in which the measured transport coefficients were available Momentum Transfer theory (MTT) was applied in order to unfold the cross sections from the measured transport data. Direct Monte Carlo method is applied to obtain swarm parameters at the temperature of T=300 K

Transport Parameters of F- Ions in BF3

In this work we presented the new results for energy dependent cross-sections and transport coefficients as a function of E/N for F- ions in BF3 gas. Results were obtained by using the Monte Carlo technique for cross-section set determined on the basis of the Nanbu theory. Monte Carlo method is applied to obtain swarm parameters at temperature of T = 300 K

Cross-Sections and Transport Properties of F- Ions in F-2

We present the new results for the simple scattering cross-section set and proposed transport coefficients for F- ions in F-2 that can be used in such models. Nanbu's theory based on thermodynamic threshold energies and separating elastic and reactive collisions is used to calculate cross-sections for binary collisions of ions with atoms and molecules. Direct MC method is applied to obtain swarm parameters at temperature of T = 300 K

Modeling of the effect of radicals on plasmas used for etching in microelectronics

Plazma nagrizanje predstavlja jedan od kritičnih koraka u izradi integrisanih kola. Dalja optimizacija plazma uređaja je potrebna jer nove generacije u tehnologiji zahtevaju različitu plazma hemiju. U ovom radu bavimo se uticajem radikala na plazma karakteristike, što je često zanemarivano u plazma modelima. Radikali dominiraju zahvatom elektrona čineći da je bazna smeša za nagrizanje slabo elektronegativna, a oni takođe modifikuju brzinu drifta preko modifikovanog balansa momenta. Mi smo koristili numerička rešenja Bolcmanove jednačine i Monte Karlo simulacije (MCS) za određivanje transportnih koeficijenata elektrona.Plasma etching represents one of the critical steps in manufacturing of integrated circuits. Further optimization of plasma equipment is needed since new generations in technology require different plasma chemistry. In this paper, we will study the influence of radicals on the plasma characteristics, since it was often neglected in plasma models. The radicals dominate attachment of electrons as the basic etching mixture is weakly electronegative and they also affect the drift velocity through modified momentum balance. We have used numerical solutions to the Boltzmann equation and Monte Carlo simulations (MCS) to determine the transport coefficients of electrons

Modeling of the effect of radicals on plasmas used for etching in microelectronics

Plazma nagrizanje predstavlja jedan od kritičnih koraka u izradi integrisanih kola. Dalja optimizacija plazma uređaja je potrebna jer nove generacije u tehnologiji zahtevaju različitu plazma hemiju. U ovom radu bavimo se uticajem radikala na plazma karakteristike, što je često zanemarivano u plazma modelima. Radikali dominiraju zahvatom elektrona čineći da je bazna smeša za nagrizanje slabo elektronegativna, a oni takođe modifikuju brzinu drifta preko modifikovanog balansa momenta. Mi smo koristili numerička rešenja Bolcmanove jednačine i Monte Karlo simulacije (MCS) za određivanje transportnih koeficijenata elektrona.Plasma etching represents one of the critical steps in manufacturing of integrated circuits. Further optimization of plasma equipment is needed since new generations in technology require different plasma chemistry. In this paper, we will study the influence of radicals on the plasma characteristics, since it was often neglected in plasma models. The radicals dominate attachment of electrons as the basic etching mixture is weakly electronegative and they also affect the drift velocity through modified momentum balance. We have used numerical solutions to the Boltzmann equation and Monte Carlo simulations (MCS) to determine the transport coefficients of electrons

Role of pressure in transport of F- ions in BF3 gas for technological applications

U ovom radu predstavili smo transportne parametre dobijene za F- jone u molekularnom gasu BF3 neophodne za formiranje globalnih modela za kompleksne sudarne plazme. Novi rezultati za set preseka i dobijeni transportni koeficijenti za F- jone u BF3 koji se mogu koristiti u takvim modelima su predstavljeni. Prvo smo koristili Nanbu teoriju za određivanje preseka binarnih sudara F- jona sa molekulima BF3. Presek za sudar tri tela uključuje egzotermni binarni presek normiran na izabrani pritisak. Koristili smo Monte Karlo metodu za dobijanje transportnih parametara na temperaturi od T = 295 K i pritisaku od 133.32 Pa (1 Torr).In this work we present swarm data obtained for F- ions in molecular gas BF3 necessary to form the global models for the complex collisional plasmas. The new results for scattering cross section set and proposed transport coefficients for F- ions in BF3 that can be used in such models are presented. First we used Nanbu's theory based on thermodynamic threshold energies to calculate cross sections for binary collisions of Fions with BF3 molecules. Cross section for three body association reaction is included by using exothermic cross section for binary reaction normalized at selected pressure. Monte Carlo method is used to obtain swarm parameters at temperature of T=295 K and pressure of 133.32 Pa (1 Torr)

Role of pressure in transport of F- ions in BF3 gas for technological applications

U ovom radu predstavili smo transportne parametre dobijene za F- jone u molekularnom gasu BF3 neophodne za formiranje globalnih modela za kompleksne sudarne plazme. Novi rezultati za set preseka i dobijeni transportni koeficijenti za F- jone u BF3 koji se mogu koristiti u takvim modelima su predstavljeni. Prvo smo koristili Nanbu teoriju za određivanje preseka binarnih sudara F- jona sa molekulima BF3. Presek za sudar tri tela uključuje egzotermni binarni presek normiran na izabrani pritisak. Koristili smo Monte Karlo metodu za dobijanje transportnih parametara na temperaturi od T = 295 K i pritisaku od 133.32 Pa (1 Torr).In this work we present swarm data obtained for F- ions in molecular gas BF3 necessary to form the global models for the complex collisional plasmas. The new results for scattering cross section set and proposed transport coefficients for F- ions in BF3 that can be used in such models are presented. First we used Nanbu's theory based on thermodynamic threshold energies to calculate cross sections for binary collisions of Fions with BF3 molecules. Cross section for three body association reaction is included by using exothermic cross section for binary reaction normalized at selected pressure. Monte Carlo method is used to obtain swarm parameters at temperature of T=295 K and pressure of 133.32 Pa (1 Torr)

The influence of F, F2 on kinetics of electrons in BF3

We present transport coefficients for electrons in mixtures of BF3 with its radicals (specifically F and F2) for ratios of the electric field to the gas number density E/N from 1 to 1000 Td (1 Td = 10-21 V m2). Our analysis of non-conservative collisions revealed a range of E/N where electron attachment to radicals significantly changes the electron kinetics compared to pure gaseous BF3. The results were obtained using simple solutions for Boltzmann’s equation and Monte Carlo simulation