SiC for sensors and high-temperature electronics

The paper presents an overview over recent developments in the SiC field. Within this field, two main streams are emerging: On the one hand, the commercial availability of bulk SiC crystals is likely to establish SiC as a new wafer technology which allows many devices to be fabricated in analogy to known Si ones. In this way, the high-temperature limit for the operation of sensors and electronic circuits can be significantly extended. Thin films of SiC, on the other hand, can be used as an add-on to the existing Si technology. Using such films, new possibilities emerge with regard to the fabrication of microsensors. Applications of thin-film SiC in optics, optoelectronics, and micromachining are demonstrated. (orig.)SIGLEAvailable from TIB Hannover / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman