3 research outputs found
Plasma Chemical Synthesis of Amorphous Hydrocarbon Films Alloyed by Silicon, Oxygen and Nitrogen
- Author
- A Tamulevi膷ien臈
- A. A. Solovyev
- A. S. Grenadyorov
- A. Ya. Kolpakov
- AS Grenadyorov
- AS Grenadyorov
- B Kleinsorge
- BP Gorshunov
- DV Shtansky
- E Ermakova
- J Mort
- J Robertson
- JC Damasceno
- K Oguri
- K. V. Oskomov
- M Ikeyama
- M Nakayama
- N. M. Ivanova
- NI Fainer
- NI Fainer
- NI Fainer
- OM Zhigalina
- P Ye
- S Bhattacherjee
- S Bulou
- S Nakao
- SS Camargo
- V. S. Sypchenko
- VI Sevast鈥檡anov
- VS Veerasamy
- WC Oliver
- X Yan
- XB Yan
- 袗小 Ferrari
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
Effect of nitrogen flow rate on the mechanical properties of CVD-deposited SiCN thin films
- Author
- A Leyland
- A S Bhattacharyya
- AC Ferrari
- AC Ferrari
- AO Kozak
- AS Bhattacharyya
- AS Bhattacharyya
- Ashis Sharma
- B Hong
- B Ma
- BD Beake
- Bibhu P Swain
- BP Swain
- BP Swain
- BP Swain
- D Kumar
- Dhruva Kumar
- F Liao
- JL Wootton
- JZ Hu
- K Ahn
- K Kalita
- KB Sundaram
- KK Mishra
- L Wang
- LM Reinold
- M Vila
- MA Schiavon
- MAA Rahman
- NI Fainer
- P Walsh
- Ranjan Kr Ghadai
- S Ruffell
- S Zhang
- Soham Das
- V Kulikovsky
- VI Ivashchenko
- WC Oliver
- Y Awad
- Y Iwamoto
- ZX Cao
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
Effect of Nitrogen Doping and Temperature on Mechanical Durability of Silicon Carbide Thin Films
- Author
- A Badzian
- A Ghabchi
- A Klausmann
- A Leo
- A Leyland
- AA Lebedev
- AS Bhattacharyya
- BD Beake
- BR Lawn
- C Pusch
- C-L Kim
- CB Ponton
- CB Ponton
- CJ Gilbert
- D Probst
- D-H Kuo
- DRP Singh
- DS Rickerby
- DT Wan
- E Tomasella
- E Zas
- G Azimi
- G Mera
- G Pagnoux
- G Yoshio
- GM Wright
- GS Was
- H Herman
- H Hoche
- H Hoche
- H Hoche
- H Holleck
- H Holleck
- HB Zhang
- HS Medeiros
- I Bert贸ti
- J Haines
- J Musil
- J Olofsson
- J Tomastik
- J Valli
- J Yang
- J Yang
- J-f Yin
- JD Stempien
- JE Krzanowski
- JE Sundgren
- JJ Cao
- JS Koehler
- JT DeMasi-Marcin
- K Farokhzadeh
- K Kamata
- K Wasmer
- K Yamamoto
- KB Sundaram
- L An
- L Kleps
- LA Liew
- M Mehregany
- MA El Saeed
- ME Launey
- MI Evans
- N Nedfors
- N Wada
- NI Fainer
- NP Padture
- NP Padture
- P Istomin
- PG Neudeck
- R Ctvrtlik
- R Ctvrtlik
- R Raj
- R Riedel
- R Riedel
- RO Ritchie
- S Firstov
- S Hogmark
- S Nakashima
- S PalDey
- S Vep艡ek
- S Wilson
- S Zhang
- S Zhang
- S Zhang
- S Zhang
- S Zhang
- SC Jambagi
- SE Rodil
- SJ Bull
- SJ Bull
- SK Mishra
- T Chikada
- T Kronberg
- T Nakamori
- TJMY Lee
- U Jansson
- V Kulikovsky
- V Kulikovsky
- V Kulikovsky
- V Kulikovsky
- VI Levitas
- W Zhang
- WJ Clegg
- X Peng
- Y Fu
- Y Wu
- Y Zhou
- YT Cheng
- YT Cheng
- YW Kim
- YX Wang
- Z Ji
- ZM Sun
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study