Shadows of the Times. Pl. 3

The lithograph is one in a series of three Civil War satires featuring shadow figures. The third plate features six cartoons that cynically depict the exploitation of war news. In the topmost cartoon, a battle scene is shown. Three center cartoons depict citizens reading war news, a man with a raised fist, and a bugler receiving instructions. The bottom two cartoons show a sentry and sergeant conversing and soldiers threatening a cow.https://scholarsjunction.msstate.edu/fvw-cartoons/1005/thumbnail.jp

Shadows of the Times. Pl. 2

The lithograph is one in a series of three Civil War satires featuring shadow figures. The second plate cynically depicts the prowess of the military. In the plate\u27s first image, male civilians and a soldier are pictured at a saloon. The plate also shows Jefferson Davis\u27s body guards, who appear disorganized. The third image features soldiers chasing, killing, and roasting pigs. In the final image, a military caravan is shown fording a river.https://scholarsjunction.msstate.edu/fvw-cartoons/1010/thumbnail.jp

Shadows of the Times. Pl. 1

The lithograph is one in a series of three Civil War satires featuring shadow figures. The first plate features six cartoons that cynically depict European intervention. The top image represents the anxiety toward European invasion during the Civil War. On the right, Queen Victoria is pictured surrounded by a lion, a bagpipe player, and a storm of demons. To the left, Columbia is shown with an American flag, eagle, and man wearing broken shackles. The second cartoon show Emperor Napoleon III of France with another officer standing before two portraits, one of an exiled Napoleon Bonaparte on the island of St. Helena and another of Emperor Frederick the Great leading his army.https://scholarsjunction.msstate.edu/fvw-cartoons/1003/thumbnail.jp

Advanced process control based on multivariate control charts and dynamic linear models

Statistical Process Control is widely used in Semiconductor Manufacturing. Univariate control charts exist for Machine data and for measurements of the processed wafers. They in general work very well but nevertheless not all faults can be detected. Especially the interaction between parameters is not taken into account. The advantages of multivariate charts are: - Data reduction by the use of only one chart for many parameters - Detection of faults that arise in the small drift of many univariate parameters - The immediate classification of the cause of failure in the chart This work tries to approach multivariate control charts for detecting and classifying faults of the etching equipments in one single step. The idea of the work is based on a paper by Goodlin et. al. ('Simultaneous Fault Detection and Classification for Semiconductor Manufacturing tool', Journal of the Electrochemical Society G778-G784(2003)). They created an experiment, where several parameters were varied, one parameter per wafer. Their method focuses on the resulting variation of the parameters which were not changed by the experiment. Normally processed wafers and the experimental wafers were used to construct univariate, T 2 and Faultspecific control charts. Especially the faultspecific charts detected most of the experimental simulated faults correctly. In this work the idea of the paper was applied to real-time data. A similar experiment was constructed on a Poly-etching machine. The experiment was designed to reflect the most important known errors of the equipment. A mix of expert know how and methods like Principal Components Regression or Partial Least Squares Regression were used to select the appropriate parameters for constructing the multivariate charts. In the next step the control charts were built for the real time data with the main focus on faultspecific charts. The next step was to control the etching of new wafers. Challenges in controlling these newly processed wafers were Wet Cleans and Process Changes. Therefore the original Faultspecific Models had to be extended to Dynamic Linear Models.Sonja MuringerAbweichender Titel laut Übersetzung der Verfasserin/des VerfassersKlagenfurt, Alpen-Adria-Univ., Diss., 2006KB2006 26OeBB(VLID)241440

Shadows of the Times. Pl. 2

The lithograph is one in a series of three Civil War satires featuring shadow figures. The second plate cynically depicts the prowess of the military. In the plate\u27s first image, male civilians and a soldier are pictured at a saloon. The plate also shows Jefferson Davis\u27s body guards, who appear disorganized. The third image features soldiers chasing, killing, and roasting pigs. In the final image, a military caravan is shown fording a river.https://scholarsjunction.msstate.edu/fvw-artifacts/1239/thumbnail.jp

Shadows of the Times. Pl. 1

The lithograph is one in a series of three Civil War satires featuring shadow figures. The first plate features six cartoons that cynically depict European intervention. The top image represents the anxiety toward European invasion during the Civil War. On the right, Queen Victoria is pictured surrounded by a lion, a bagpipe player, and a storm of demons. To the left, Columbia is shown with an American flag, eagle, and man wearing broken shackles. The second cartoon show Emperor Napoleon III of France with another officer standing before two portraits, one of an exiled Napoleon Bonaparte on the island of St. Helena and another of Emperor Frederick the Great leading his army.https://scholarsjunction.msstate.edu/fvw-artifacts/1207/thumbnail.jp