On the Modeling of an Open Channel MEMS Based Capacitive Flow Sensor

In this paper an open channel MEMS capacitive flow sensor has been designed based on a microplate deflection measuring. Proposed flow sensor consists with two separate units, one for sensing the static fluid pressure and the other for sensing the fluid static and dynamic pressure. The governing equation whose solution holds the answer to all our questions about the sensor’s characteristics is a nonlinear elasto-electrostatic equation. Sensor’s static response and mechanical behavior of the sensing elements in a channel have been simulated numerically by using of Step by Step Linearization Method. The sensor stability has been examined and the stable region of the sensor has been studied. The effect of fluid velocity and static pressure on stability limit of the sensor has been investigated and the effect of bias voltage on sensor sensitivity has been studied