Femtosecond pulsed laser direct write production of nano- and microfluidic channels

Nano- and microfluidic channels were produced by selectively delaminating 1200 nm1200nm thermally grown oxide films (SiO2)(SiO2) films from Si(100) substrates using a femtosecond pulsed laser. Single pass channels exhibiting bell-like cross sections with widths of 24 μm24μm and heights of 355 nm355nm were directly written at a speed of 1 cm/s1cm∕s, while larger channels (320 μm320μm in width and ∼ 15 μm∼15μm in height) were produced by laterally overlapping single pass channels. The results of an investigation of the interior surfaces of the channels via atomic force microscopy and scanning electron microscopy are presented.Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/87769/2/183113_1.pd

Femtosecond-laser-induced delamination and blister formation in thermal oxide films on silicon (100)

Silicon (100) substrates with thermal oxide films of varying thickness were irradiated with single and multiple 150 fs150fs laser pulses at normal and non-normal incidences. A range of laser fluence was found in which a blister or domelike feature was produced where the oxide film was delaminated from the substrate. At normal and non-normal incidences blister features were observed for samples with 54, 147, and 1200 nm1200nm of thermal oxide. The blister features were analyzed with optical and atomic force microscopy. In addition, the time frame for blister growth was obtained using pump-probe imaging techniques.Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/87772/2/153121_1.pd

Oil Sniffer

Capstone Design and Manufacturing Experience: Fall 2006Commercial aircraft travel can be an uncomfortable experience for some due to cabin odor. At times, the source of the problem is oil in the air supply taken from the engine compressor. The rationale for the “oil sniffer” is the need for a non-subjective method of measuring commercial aircraft cabin odor. Current particulate sensor technologies are both bulky and cost prohibitive for use during flight. This portable device will be developed by determining the acceptable limit of oil particulates in cabin air, and the feasibility of applying existing sensor technologies into the detection of oil particulates in the air.http://deepblue.lib.umich.edu/bitstream/2027.42/49561/2/ME450 Final Team 09.pd