5 research outputs found
Surface properties of Me/Si structures prepared by means of self-ion assisted deposition.
In this paper a composite structure, topography, wettability and nanohardness of a (100) Si surface modified by means of ion-assisted deposition of metal (Me) coatings in conditions of a self-irradiation are discussed
Surface Properties of Me/Si Structures Prepared by Means of Self-Ion Assisted Deposition
In this paper a composite structure, topography, wettability and nanohardness of a (100) Si surface modi ed by means of ion-assisted deposition of metal (Me) coatings in conditions of a self-irradiation are discussed. Π Π΄Π°Π½Π½ΠΎΠΉ ΡΠ°Π±ΠΎΡΠ΅ ΠΎΠ±ΡΡΠΆΠ΄Π°ΡΡΡΡ ΠΊΠΎΠΌΠΏΠΎΠ·ΠΈΡΠ½Π°Ρ ΡΡΡΡΠΊΡΡΡΠ°, ΡΠΎΠΏΠΎΠ³ΡΠ°ΡΠΈΡ, ΡΠΌΠ°ΡΠΈΠ²Π°Π΅ΠΌΠΎΡΡΡ ΠΈ Π½Π°Π½ΠΎΡΠ²Π΅ΡΠ΄ΠΎΡΡΡ ΠΏΠΎΠ²Π΅ΡΡ
Π½ΠΎΡΡΠΈ (100) Si, ΠΌΠΎΠ΄ΠΈΡΠΈΡΠΈΡΠΎΠ²Π°Π½Π½ΠΎΠΉ ΠΌΠ΅ΡΠΎΠ΄ΠΎΠΌ ΠΈΠΎΠ½Π½ΠΎΠ³ΠΎ ΠΎΡΠ°ΠΆΠ΄Π΅Π½ΠΈΡ ΠΌΠ΅ΡΠ°Π»Π»ΠΈΡΠ΅ΡΠΊΠΈΡ
(Me) ΠΏΠΎΠΊΡΡΡΠΈΠΉ Π² ΡΡΠ»ΠΎΠ²ΠΈΡΡ
ΡΠ°ΠΌΠΎΠΈΠ·Π»ΡΡΠ΅Π½ΠΈΡ
Analysis of the composition of Ti-based thin films deposited on silicon by means of self-ion assisted deposition
The composition of Ti-based thin films deposited on silicon using a self-ion assisted deposition (SIAD) methodwas investigated by utilising the Rutherford backscattering spectrometry technique and RUMP simulation code. Π‘ΠΎΡΡΠ°Π² ΡΠΎΠ½ΠΊΠΈΡ
ΠΏΠ»Π΅Π½ΠΎΠΊ Π½Π° ΠΎΡΠ½ΠΎΠ²Π΅ Ti, Π½Π°Π½Π΅ΡΠ΅Π½Π½ΡΡ
Π½Π° ΠΊΡΠ΅ΠΌΠ½ΠΈΠΉ Ρ ΠΈΡΠΏΠΎΠ»ΡΠ·ΠΎΠ²Π°Π½ΠΈΠ΅ΠΌ ΠΌΠ΅ΡΠΎΠ΄Π° ΡΠ°ΠΌΠΎΠΈΠΎΠ½Π½ΠΎ-Π°ΡΡΠΈΡΡΠΈΡΠΎΠ²Π°Π½Π½ΠΎΠ³ΠΎ ΠΎΡΠ°ΠΆΠ΄Π΅Π½ΠΈΡ (SIAD), Π±ΡΠ» ΠΈΡΡΠ»Π΅Π΄ΠΎΠ²Π°Π½ Ρ ΠΈΡΠΏΠΎΠ»ΡΠ·ΠΎΠ²Π°Π½ΠΈΠ΅ΠΌ ΠΌΠ΅ΡΠΎΠ΄ΠΈΠΊΠΈ ΡΠΏΠ΅ΠΊΡΡΠΎΠΌΠ΅ΡΡΠΈΠΈ ΠΎΠ±ΡΠ°ΡΠ½ΠΎΠ³ΠΎ ΡΠ°ΡΡΠ΅ΡΠ½ΠΈΡ Π Π΅Π·Π΅ΡΡΠΎΡΠ΄Π° ΠΈ ΠΊΠΎΠ΄Π° ΠΌΠΎΠ΄Π΅Π»ΠΈΡΠΎΠ²Π°Π½ΠΈΡ RUMP
Topography and water wettability of Mo films evaporated onto glass by means of self-ion assisted deposition
Mo thin film back contact layers for solar cells were deposited onto glass substrates using a self-ion assisted deposition method (SIAD). We have observed that deposition of Mo thin film on glass can be used for receiving surface with desirable topography and water wettability