4 research outputs found
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Micromachined in-plane acoustic pressure gradient sensors
textThis work presents the fabrication, modeling, and characterization of two first-generation acoustic in-plane pressure gradient sensors. The first is a micromachined piezoelectric microphone. The microphone structure consists of a semi-rigid beam structure that rotates about torsional pivots in response to in-plane pressure gradients across the length of the beam. The rotation of the beam structure is transduced by piezoelectric cantilevers, which deflect when the beam structure rotates. Sensors with both 10 and 20-ÎĽm-thick beam structures are presented. An analytical model and multi-mode, multi-port network model utilizing finite-element analysis for parameter extraction are presented and compared to acoustic sensitivity measurements. Directivity measurements are interpreted in terms of the multi-mode model. A noise model for the sensor and readout electronics is presented and compared to measurements. The second sensor is a capacitive sensor which is comprised of two vacuum-sealed, pistons coupled to each other by a pivoting beam. The use of a pivoting beam can, in principle, enable high rotational compliance to in-plane small-signal acoustic pressure gradients, while resisting piston collapse against large background atmospheric pressure. A design path towards vacuum-sealed, surface micromachined broadband microphones is a motivation to explore the sensor concept. Fabrication of surface micromachined prototypes is presented, followed by finite element modeling and experimental confirmation of successful vacuum-sealing. Dynamic frequency response measurements are obtained using broadband electrostatic actuation and confirm a first fundamental rocking mode near 250 kHz. Successful reception of airborne ultrasound in air at 130 kHz is also demonstrated, and followed by a discussion of design paths toward improve signal-to-noise ratio beyond that of the initial prototypes presented. A method of localizing sound sources is demonstrated using the piezoelectric sensor. The localization method utilizes the multiple-port nature of the sensor to simultaneously extract the pressure gradient and pressure magnitude components of the incoming acoustic signal. An algorithm for calculating the sound source location from the pressure gradient and pressure magnitude measurement is developed. The method is verified by acoustic measurements performed at 2 kHz.Electrical and Computer Engineerin
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Acoustic sensor
A method of designing and manufacturing an acoustic sensor having a high degree of directivity is disclosed. The sensor includes a rotatable plate that is attached to a substrate with mounts. In one aspect the mounts are freely rotatable and the torque on the plate is measured using detectors disposed on springs that provide a resistance to rotation of the plate. In another aspect the plate is mounted to the substrate with mounts that torsionally deform during rotation of the plate. These detectors measure the torque on the plate according to the torsional deformation of the mounts. Methods of improving the signal to noise ratio of acoustic sensors having multiple detectors are also disclosed.Board of Regents, University of Texas Syste
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Modeling and prototyping of a micromachined optical microphone
textA microelectromechanical systems (MEMS) optical microphone that measures the interference of light resulting from its passage through a diffraction grating and reflection from a vibrating diaphragm (JASA, v. 122, no. 4, 2007) is described. In the present embodiment, both the diffractive optical element and the sensing diaphragm are micromachined on silicon. Additional system components include a semiconductor laser, photodiodes, and required readout electronics. Advantages of this optical detection technique have been demonstrated with both omni-directional microphones and biologically inspired directional microphones. In efforts to commercialize this technology for hearing-aids and other applications, a goal has been set to achieve a microphone contained in a small surface mount package (occupying 2mm x 2mm x 1mm volume), with ultra-low noise (20 dBA), and broad frequency response (20Hz–20kHz). Such a microphone would be consistent in size with the smallest MEMS microphones available today, but would have noise performance characteristic of professional-audio microphones significantly larger in size and more expensive to produce. This paper will present several unique challenges in our effort to develop the first surface mount packaged optical MEMS microphone. The package must accommodate both optical and acoustical design considerations. Dynamic models used for simulating frequency response and noise spectra of fully packaged microphones are presented and compared with measurements performed on prototypes.Electrical and Computer Engineerin
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Differential microphone with sealed backside cavities and diaphragms coupled to a rocking structure thereby providing resistance to deflection under atmospheric pressure and providing a directional response to sound pressure
A vacuum sealed directional microphone and methods for fabricating said vacuum sealed directional microphone. A vacuum sealed directional microphone includes a rocking structure coupled to two vacuum sealed diaphragms which are responsible for collecting incoming sound and deforming under sound pressure. The rocking structure's resistance to bending aids in reducing the deflection of each diaphragm under large atmospheric pressure. Furthermore, the rocking structure exhibits little resistance about its pivot thereby enabling it to freely rotate in response to small pressure gradients characteristic of sound. The backside cavities of such a device can be fabricated without the use of the deep reactive ion etch step thereby allowing such a microphone to be fabricated with a CMOS compatible process.Board of Regents, University of Texas Syste