Waveguide Bragg gratings in Ormocer hybrid polymers

We report on the fabrication of Bragg gratings within rib-type waveguides of previously UV-cured inorganic-organic Ormocer hybrid polymers by applying the interferometric phase mask technique in conjunction with deep-UV laser radiation. The fabrication process as well as the influence of the applied laser fluence and the length of the Bragg grating on the characteristics of the Bragg gratings transmission and reflection spectra are discussed and compared to numerical simulations and calculations. Depending on the applied laser fluence and the chosen grating length, waveguide Bragg gratings with strong reflectivities of up to 98% and narrow bandwidths of down to 120 pm have been achieved

Waveguide bragg gratings in Ormocer®s for temperature sensing

Embedded channel waveguide Bragg gratings are fabricated in the Ormocer® hybrid polymers OrmoComp®, OrmoCore, and OrmoClad by employing a single writing step technique based on phase mask technology and KrF excimer laser irradiation. All waveguide Bragg gratings exhibit well-defined reflection peaks within the telecom wavelengths range with peak heights of up to 35 dB and −3 dB-bandwidths of down to 95 pm. Furthermore, the dependency of the fabricated embedded channel waveguide Bragg gratings on changes of the temperature and relative humidity are investigated. Here, we found that the Bragg grating in OrmoComp® is significantly influenced by humidity variations, while the Bragg gratings in OrmoCore and OrmoClad exhibit linear and considerably high temperature sensitivities of up to −250 pm/ ∘ C and a linear dependency on the relative humidity in the range of −9 pm/%

One-step nanoimprinted Bragg grating sensor based on hybrid polymers

Bragg grating sensors are used for real-time analysis of gases or liquids. Complex processing methods are typically required for the sensor fabrication. A reduction of process steps and costs during their fabrication is essential in order to broaden the field of application. Within this work, we demonstrate an innovative process for a one-step fabrication of integrated Bragg grating sensors and their successful application for temperature and refractive index sensing. UV-enhanced substrate conformal imprint lithography (UV-SCIL) is used to replicate surface relief Bragg grating (SBG) sensors on a full wafer scale. Multiple chips of a planar waveguide system including couplers and junctions were etched into a silicon wafer. Nanostructured SBGs were locally added on the waveguides by focused ion beam processing. The sensor structures were replicated by UV-SCIL into a commercially available hybrid polymer (OrmoComp®). Reflection measurements with different Bragg gratings were performed and compared to simulations. The results reveal narrow-band Bragg reflections, coinciding with the simulations. Further, the temperature dependence of the SBGs was investigated. The imprinted grating structures featured a very high temperature sensitivity of −202 pm/°C. The sensor response to a varying refractive index of the surrounding medium was determined for index matching liquids and aqueous solutions

TiO2 surface functionalization of COC based planar waveguide Bragg gratings for refractive index sensing

We demonstrate the applicability of a planar waveguide Bragg grating in cyclo-olefin copolymer (COC) for refractive index sensing. The polymer planar waveguide Bragg grating fabricated using a single writing step technique is coated with a high-index layer of titanium dioxide (TiO2) leading to a distinct birefringence. This in turn results in the splitting of the Bragg reflection into two distinct Bragg wavelengths, which strongly differ regarding their refractive index sensitivities. Where one wavelength is only slightly affected by the ambient refractive index, the second Bragg peak shows a strong sensitivity. Furthermore, we investigate the temperature behaviour of the functionalized sensor and discuss it with respect to applications in refractive index sensing