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4 research outputs found

Repairing photomasks by nanomachining

Author: Emily Gallagher
Gregory McIntyre
Mark Lawliss
Michael Archuletta
Ron Bozak
Tod Robinson
Publication venue: SPIE-Intl Soc Optical Eng
Publication date: 18/03/2013
Field of study

Applications and development of BitClean technology including selective nanoparticle manipulation

Author: Daniel Yi
David Brinkley
Jeff LeClaire
Michael Archuletta
Ron Bozak
Roy White
Tod Robinson
Publication venue: SPIE
Publication date: 30/06/2012
Field of study

Through-focus EUV multilayer defect repair with nanomachining

Author: Adam C. Smith
Emily Gallagher
Gregory McIntyre
Jeffrey LeClaire
Mark Lawliss
Michael Archuletta
Ron Bozak
Roy White
Tod Robinson
Publication venue: SPIE
Publication date: 01/04/2013
Field of study

Preliminary results for photomask haze mitigation in a fab environment

Author: David Lee
Gek Soon Chua
Jeff LeClaire
Michael Archuletta
Ron Bozak
Roy White
Sia Kim Tan
Thomas Ku
Tod Robinson
Publication venue: SPIE-Intl Soc Optical Eng
Publication date: 11/03/2010
Field of study

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