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2 research outputs found

Plasma removal of Parylene C

Author: Egitto F D
Ellis Meng
Gazicki M
Gorham W F
He Q Meng E Tai Y-C Rutherglen C M Erickson J Pine J
Kroschwitz J I
Lieberman M A
Manos D M
Meng E Tai Y-C Erickson J Pine J
Po-Ying Li
Sabeti R
Sawyer L C
Selvarasah S
Tai Y C
Wang X Q Tai Y C
Wang X-Q Lin Q Tai Y-C
Wolgemuth L
Xie J He Q Tai Y-C Liu J Lee T
Youn S W
Yu-Chong Tai
Zahn J D Gabriel K J Fedder G K
Publication venue: 'IOP Publishing'
Publication date
Field of study

Design and fabrication of a high-aspect-ratio parylene-based comb-drive actuator for large displacements at a low driving force

Author: Chen-Wei Chen
Chih-Ming Liu
Galentis Srl
Hartwell P G Bertsch F M Miller S A Turner K L MacDonald N C
Hopcroft M A
Laermer F Schilp A
Legtenberg R
Tooker A Meng E Erickson J Tai Y-C Pine J
Wen-Cheng Kuo
Yang Y-J
Yang Y-J
Publication venue: 'IOP Publishing'
Publication date
Field of study

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