Pillar structured thermal neutron detector with 6:1 aspect ratio,”

Abstract-Pillar detector is an innovative solid state device structure that leverages advanced semiconductor fabrication technology to produce a device for thermal neutron detection. State-of-the-art thermal neutron detectors have shortcomings in achieving simultaneously high efficiency, low operating voltage while maintaining adequate fieldability performance. By using a 3-dimensional silicon PIN diode pillar array filled with isotopic boron 10, ( 10 B) a high efficiency device is theoretically possible. The fabricated pillar structures reported in this work are composed of 2 µm diameter silicon pillars with a 4 µm pitch and pillar heights of 6 and 12 µm. The pillar detector with a 12 µm height achieved a thermal neutron detection efficiency of 7.3% at 2V