24 research outputs found
Particle Collecting in a 13.56 MHz Radiofrequency Methane Discharge
Fig. 1: Particle trapping near the electrodes in RF methane plasma (RF = 80W, pressure 130 Pa and flow rate 5.6 sccm) put in evidence by laser light scattering: (a) under the RF electrode 200 s after the plasma is switched on, (b) above the grounded electrode 300 s after the plasma is switched on. The particle cloud form follows the electrical field lines. The authors are with the GREMI, Groupe de Recherches sur l'Energétique des Milieux Ionisés, UMR6606, CNRS/Université d'Orléans, Faculté de
Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power
International audienc
Influence of the particle formation and behavior on the electrical parameters in low pressure radio-frequency CH4/N2 discharges
International audienc
Formation et structure de particules obtenues dans un plasma radio-fréquence basse pression CH4-N2
Influence of the power on the particles generated in a low pressure radio-frequency nitrogen -rich methane discharge
International audienc
Luminescence properties and structure of hydrogen amorphous carbon nitrile particles obtained in CH4/N2 RF plasmas
International audienc
Analyse par Spectroscopie infrarouge des particules carbonées contenues dans une décharge R.F. basse pression de méthane azote
National audienc
Influence of the particle formation and behavior on the electrical parameters in the low pressure radio frequency discharge.
International audienc
Particles generated in a low pressure radio frequency nitrogen-rich methane discharge
International audienc