Correction of scan line shift artifacts in scanning electron microscopy:An extended digital image correlation framework

\u3cp\u3eHigh resolution scanning electron microscopy (HR-SEM) is nowadays very popular for different applications in different fields. However, SEM images may exhibit a considerable amount of imaging artifacts, which induce significant errors if the images are used to measure geometrical or kinematical fields. This error is most pronounced in case of full field deformation measurements, for instance by digital image correlation (DIC). One family of SEM artifacts result from positioning errors of the scanning electron beam, creating artifactual shifts in the images perpendicular to the scan lines (scan line shifts). This leads to localized distortions in the displacement fields obtained from such images, by DIC. This type of artifacts is corrected here using global DIC (GDIC). A novel GDIC framework, considering the nonlinear influence of artifacts in the imaging system, is introduced for this purpose. Using an enriched regularization in the global DIC scheme, based on an error function, the scan line shift artifacts are captured and eliminated. The proposed methodology is demonstrated in virtually generated and deformed images as well as real SEM micrographs. The results confirm the proper detection and elimination of this type of SEM artifacts.\u3c/p\u3

Correction of scanning electron microscope imaging artifacts in a novel digital image correlation framework

\u3cp\u3eThe combination of digital image correlation (DIC) and scanning electron microscopy (SEM) enables to extract high resolution full field displacement data, based on the high spatial resolution of SEM and the sub-pixel accuracy of DIC. However, SEM images may exhibit a considerable amount of imaging artifacts, which may seriously compromise the accuracy of the displacements and strains measured from these images. The current study proposes a unified general framework to correct for the three dominant types of SEM artifacts, i.e. spatial distortion, drift distortion and scan line shifts. The artifact fields are measured alongside the mechanical deformations to minimize the artifact induced errors in the latter. To this purpose, Integrated DIC (IDIC) is extended with a series of hierarchical mapping functions that describe the interaction of the imaging process with the mechanics. A new IDIC formulation based on these mapping functions is derived and the potential of the framework is tested by a number of virtual experiments. The effect of noise in the images and different regularization options for the artifact fields are studied. The error in the mechanical displacement fields measured for noise levels up to 5% is within the usual DIC accuracy range for all the cases studied, while it is more than 4 pixels if artifacts are ignored. A validation on real SEM images at three different magnifications confirms that all three distortion fields are accurately captured. The results of all virtual and real experiments demonstrate the accuracy of the methodology proposed, as well as its robustness in terms of convergence.\u3c/p\u3

Experimental full-field analysis of size effects in miniaturized cellular elastomeric metamaterials

Cellular elastomeric metamaterials are interesting for various applications, e.g. soft robotics, as they may exhibit multiple microstructural pattern transformations, each with its characteristic mechanical behaviour. Numerical literature studies revealed that pattern formation is restricted in (thick) boundary layers causing significant mechanical size effects. This paper aims to experimentally validate these findings on miniaturized specimens, relevant for real applications, and to investigate the effect of increased geometrical and material imperfections resulting from specimen miniaturization. To this end, miniaturized cellular metamaterial specimens are manufactured with different scale ratios, subjected to in-situ micro-compression tests combined with digital image correlation yielding full-field kinematics, and compared to complementary numerical simulations. The specimens' global behaviour agrees well with the numerical predictions, in terms of pre-buckling stiffness, buckling strain and post-buckling stress. Their local behaviour, i.e. pattern transformation and boundary layer formation, is also consistent between experiments and simulations. Comparison of these results with idealized numerical studies from literature reveals the influence of the boundary conditions in real cellular metamaterial applications, e.g. lateral confinement, on the mechanical response in terms of size effects and boundary layer formation.boundary conditions in real cellular metamaterial applications, e.g. lateral confinement, on the mechanical response in terms of size effects and boundary layer formation