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1 research outputs found
Multi-sensitive temperature sensor platforms using aluminum nitride MEMS resonators
Author
Aigner R
Bechmann R
+16Â more
Campanella H
Campanella H
CMEMS Technology. Silicon Labs.
Humberto Campanella
Jeffrey B W Soon
Marco Ferrari
Margarita Narducci
Martin D M
MEMS Oscillators. Vectron
MEMS timing
MEMS-based Oscillators & Clock Generators. Discera
Navab Singh
Ruby R C
Srinivas Merugu
Vittorio Ferrari
Wingqvist G
Publication venue
'IOP Publishing'
Publication date
Field of study
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