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Molybdenum Oxides Deposited by Modulated Pulse Power Magnetron Sputtering: Stoichiometry as a Function of Process Parameters

Author: A Bouzidi
A Phelps
B Liebig
BW Faughnan
C Battaglia
C Ramana
C Ramana
CG Granqvist
CR Clayton
CV Ramana
D Depla
D Depla
D Depla
D Depla
D Guttler
D Mutschall
DO Scanlon
DS Kim
E Comini
F Werfel
G Nazri
H Martínez
H Martínez
H Simchi
H Zhang
I Petrov
IE Wachs
J Alami
J Besenhard
J Besenhard
J Horkans
J Lin
J Lin
J Lin
J Lin
J Lin
J- Faou
JF Moulder
JG Choi
JI Pankove
John G. Jones
John T. Grant
K Sarakinos
L Meng
Lirong Sun
M Al-Kuhaili
M Ferroni
M Hála
M Rouhani
M Zhang
MAPB Barna
N Miyata
Neil R. Murphy
O Marin-Flores
P Qin
R Sundararaman
Rachel Jakubiak
S Berg
S Chuang
S Dushman
S Konstantinidis
S Kubota
S Mohamed
S Sunu
T He
T Lange
TS Sian
V Kouznetsov
V Nirupama
V Nirupama
V Nirupama
W Moshier
WD Sproul
WD Sproul
X Haitao
Y Shi
Y Sun
Y Sun
Y Sun
Y Xu
YC Liu
Publication venue: 'Springer Science and Business Media LLC'
Publication date
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