14 research outputs found

    The effect of frequency on the lifetime of a surface micromachined microengine driving a load

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    Experiments have been performed on surface micromachined microengines driving load gears to determine the effect of the rotation frequency on median cycles to failure. The authors did observe a frequency dependence and have developed a model based on fundamental wear mechanisms and forces exhibited in resonant mechanical systems. Stressing loaded microengines caused observable wear in the rotating joints and in a few instances led to fracture of the pin joint in the drive gear

    Lubrication of polysilicon micromechanisms with self-assembled monolayers

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    Here, the authors report on the lubricating effects of self-assembled monolayers (SAMs) on MEMS by measuring static and dynamic friction with two polysilicon surface- micromachined devices. The first test structure is used to study friction between laterally sliding surfaces and with the second, friction between vertical sidewalls can be investigated. Both devices are SAM-coated following the sacrificial oxide etch and the microstructures emerge released and dry from the final water rinse. The coefficient of static friction, {mu}{sub s} was found to decrease from 2.1 {+-} 0.8 for the SiO{sub 2} coating to 0.11 {+-} 0.01 and 0.10 {+-} 0.01 for films derived from octadecyltrichloro-silane (OTS) and 1H,1H,2H,2H-perfluorodecyl-trichlorosilane (FDTS). Both OTS and FDTS SAM-coated structures exhibit dynamic coefficients of friction, {mu}{sub d} of 0.08 {+-} 0.01. These values were found to be independent of the apparent contact area, and remain unchanged after 1 million impacts at 5.6 {micro}N (17 kPa), indicating that these SAMs continue to act as boundary lubricants despite repeated impacts. Measurements during sliding friction from the sidewall friction testing structure give comparable initial {mu}{sub d} values of 0.02 at a contact pressure of 84 MPa. After 15 million wear cycles, {mu}{sub d} was found to rise to 0.27. Wear of the contacting surfaces was examined by SEM. Standard deviations in the {mu} data for SAM treatments indicate uniform coating coverage

    Wear mechanisms and friction parameters for sliding wear of micron-scale polysilicon sidewalls

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    As tribological properties are critical factors in the reliability of silicon-based microelectromechanical systems, it is important to understand what governs wear and friction. Average dynamic friction, wear volumes and morphology have been studied for polysilicon devices fabricated using the Sandia SUMMiT VTM process and actuated in room-temperature air at µN loads. A total of seven devices was tested for total life. Three of the total-life experiments showed a global peak in the friction coefficient at three times the initial value with failure after 10^5 cycles. Four other total-life experiments ran similarly up to 10^5 cycles; however, following this global peak in the friction coefficient these devices continued to operate and achieved a lower steady-state friction regime with no failure for millions of cycles. Coincident with the friction coefficient increase, the nano-scale wear coefficient and surface roughness increased sharply in the first 10^5 cycles and then decayed over several million cycles. These results are considered in terms of a mechanistic understanding of wear and friction: after an initial short adhesive wear regime with early failures attributed to local spikes in friction caused by differences in the local nano-scale surface morphology, three-body abrasive wear becomes the governing mechanism, allowing the devices to achieve a steady-state friction regime. Changing the relative humidity, sliding speed and load in the steady-state regime, in which devices spend the majority of their operating life, is found to influence the friction coefficient, but re-oxidation of worn polysilicon surfaces was only found to have an effect on the friction coefficient after periods of inactivity.
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