Optimized switching control for fast motion systems with nanometer accuracy

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Frequency-domain stability conditions for split-path nonlinear systems

This paper considers the class of control systems containing so-called split-path nonlinear (SPAN) filters, which are designed to overcome some of the well-known fundamental limitations in linear time-invariant (LTI) control. In this work, we are interested in developing tools for the stability analysis of such systems using frequency-domain techniques. Hereto, we explicitly show the equivalence between a set of linear matrix inequalities (LMIs) with S-procedure terms, guaranteeing stability of the closed-loop (SPAN) system, and a frequency-domain condition. We also provide a systematic procedure for verifying the frequency-domain condition in a graphical manner. The results are illustrated through a nummerical case study.</p

Data-based motion control of wafer scanners

This paper gives an exposition of examples of data-based control and optimization that found their way to successful application in the motion systems of industrial wafer scanners. The examples represent selective works brought together in an overview that highlights the possibilities, challenges, and open issues in data-based motion control of wafer scanners