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5 research outputs found

Pulsed excimer and Nd: YAG laser crystallization of a-Si: H

Author: de Unamuno S.
Elliq M.
Fogarassy E.
Fuchs C.
Stoquert J.P.
Publication venue: 'Elsevier BV'
Publication date: 01/01/1990
Field of study

Influence of hydrogen on the structure and surface morphology of pulsed arf excimer laser crystallized amorphous silicon thin film

Author: de Unamuno S.
Elliq M.
Fogarassy E.
Mathe E.L.
Naudon A.
Publication venue: 'Elsevier BV'
Publication date: 01/01/1992
Field of study

One-step Growth of Polycrystalline Silicon thin Films at Low-temperature by ARF Excimer Laser-induced Photo-CVD

Author: de Unamuno S.
Elliq M.
Fogarassy E.
Fuchs C.
Mathe E.L.
Prevot B.
Stoquert J.P.
Publication venue: 'Elsevier BV'
Publication date: 01/01/1992
Field of study

Pulsed laser crystallization of hydrogen-free a-Si thin films for high-mobility poly-Si TFT fabrication

Author: A. Mimura
A. Naudon
A. Naudon
B. Prevot
B. Prévot
E. Fogarassy
E. L. Mathe
E.L. Mathé
G. Harbeke
G. Harbeke
H. Pattyn
H.J. Leamy
J. Gonzalez-Hernandez
K. Kobayashi
K. Sera
K. Winer
M. Elliq
M. Elliq
R.Z. Bachrach
R.Z. Bachrach
S. Unamuno
S. Unamuno de
T. Nishimura
T. Sameshima
T. Serikawa
T. Unagami
Publication venue: 'Springer Science and Business Media LLC'
Publication date
Field of study

Excimer-laser-assisted RF glow-discharge deposition of amorphous and microcrystalline silicon thin films

Author: A. Canillas
A. Turos
A.A. Howling
D.E. Aspnes
D.E. Aspnes
D.L. Staebler
G. Auvert
J. Spousta
M. Elliq
M. Gerri
N. Layadi
N. Layadi
N. Layadi
N. Layadi
P. Roca i Cabarrocas
P. Roca i Cabarrocas
R. Carluccio
R.M.A. Azzam
S. Unamuno De
T. Sameshima
W. Marine
Publication venue: 'Springer Science and Business Media LLC'
Publication date
Field of study

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