High-Q distributed-Bragg-grating laser cavities

Applying Bragg gratings in Al2O3 channel waveguides, we demonstrate distributed Bragg reflectors with Q-factors of 1.02x10e6. An integrated Al2O3:Yb3+ waveguide laser with 67% slope efficiency and 47 mW output power is achieved with such cavities

Laser interference lithography with highly accurate interferometric alignment

Three dimensional photonic crystals, e.g. for obtaining the so-called woodpile structure, can, among others, be fabricated by vertical stacking of multiple gratings. One of the requirements for obtaining a full photonic bandgap in such a photonic crystal is an accurate angular and lateral alignment of the successive gratings. Using laser interference lithography at 266 nm wavelength, we fabricated gratings in silicon with periods down to 300 nm. We present a method for aligning further grating exposures with respect to this grating with a 0.001 degree angular and a few nanometers lateral resolution

Single-Frequency, Narrow-Linewidth Distributed Feedback Waveguide Laser in Al2O3:Er3+ on Silicon

A distributed feedback channel waveguide laser in erbium-doped aluminum oxide on a silicon substrate is reported. The optically pumped laser has a threshold pump power of 15 mW and emits 3 mW in single-frequency operation at 1545.2 nm wavelength with a slope efficiency of 6.2% and linewidth of 15 kHz

Laser interference lithography with highly accurate interferometric alignment

It is shown experimentally that in laser interference lithography, by using a reference grating, respective grating layers can be positioned with high relative accuracy. A 0.001 degree angular and a few nanometers lateral resolution have been demonstrated

Grated waveguide cavity for label-free protein and mechano-optical gas sensing

We demonstrate the versatility of a silicon nitride grated waveguide optical cavity as compact integrated optical sensors for (bulk) concentration detection, label-free protein sensing, and – with an integrated cantilever suspended above it – gas sensing