Integrated microfluidic–microoptical systems fabricated by dry etching of soda-lime glass

International audienc

INTEGRATED MICROFLUIDIC-MICROOPTICAL DETECTION SYSTEMS FABRICATED BY DRY ETCHING OF SODA-LIME GLASS

ABSTRACT In this paper, a method of fabrication of a microfluidic system, integrated with fluorescence detection optics, is presented. Soda-lime glass is used as a substrate material, in which the waveguiding optics is fabricated by means of an ion exchange process, whereas the microfluidic channel is manufactured utilising reactive ion etching technique. Basic optical characteristics of the device are also reported