Formation of nanoscale structures by inductively coupled plasma etching

This paper will review the top down technique of ICP etching for the formation of nanometer scale structures. The increased difficulties of nanoscale etching will be described. However it will be shown and discussed that inductively coupled plasma (ICP) technology is well able to cope with the higher end of the nanoscale: features from 100nm down to about 40nm are relatively easy with current ICP technology. It is the ability of ICP to operate at low pressure yet with high plasma density and low (controllable) DC bias that helps greatly compared to simple reactive ion etching (RIE) and, though continual feature size reduction is increasingly challenging, improvements to ICP technology as well as improvements in masking are enabling sub-10nm features to be reached. Nanoscale ICP etching results will be illustrated in a range of materials and technologies. Techniques to facilitate etching (such as the use of cryogenic temperatures) and techniques to improve the mask performance will be described and illustrated

Formation of nanoscale structures by inductively coupled plasma etching

This paper will review the top down technique of ICP etching for the formation of nanometer scale structures. The increased difficulties of nanoscale etching will be described. However it will be shown and discussed that inductively coupled plasma (ICP) technology is well able to cope with the higher end of the nanoscale: features from 100nm down to about 40nm are relatively easy with current ICP technology. It is the ability of ICP to operate at low pressure yet with high plasma density and low (controllable) DC bias that helps greatly compared to simple reactive ion etching (RIE) and, though continual feature size reduction is increasingly challenging, improvements to ICP technology as well as improvements in masking are enabling sub-10nm features to be reached. Nanoscale ICP etching results will be illustrated in a range of materials and technologies. Techniques to facilitate etching (such as the use of cryogenic temperatures) and techniques to improve the mask performance will be described and illustrated

Atosiban-induced acute pulmonary edema: A rare but severe complication of tocolysis

Background: Atosiban is commonly used to delay premature labor in pregnant women and is thought to have few side effects. Objectives: To report a case of acute pulmonary edema (APE) following administration of atosiban and conduct a systematic review to identify common characteristics and risk factors of atosiban-associated APE. Methods: Searches were performed in Pubmed, Embase, and Web of Science using the keyword “Atosiban” combined with the terms “Pulmonary edema” or “Dyspnea” or “Hypoxia” on 9th July 2022. Only case reports of atosiban-associated APE were included without language restrictions. Data were extracted from the reports, and median, range, and percentages were calculated as applicable. The risk of bias was assessed using the Joanna Briggs Institute critical appraisal checklist for case reports. Results: Seven cases of atosiban-associated APE were included in the systematic review, including our case. APE occurred at a median gestational age of 32 + 6 weeks. Most patients were nulliparous (6/7, 85.7%) and were in multiple pregnancies (5/7, 71.4%). All patients were prescribed antenatal corticosteroids and tocolytics, with three (42.9%) receiving only atosiban and four (57.1%) receiving atosiban and other tocolytics. The median interval from starting atosiban administration to APE onset was about 40 h, and three patients (42.9%) showed symptoms 2–10 h after the end of atosiban treatment. Radiographic examinations (chest X-ray and/or computer tomography scan) confirmed APE in all patients and pleural effusion in four patients (57.1%). Five patients (71.4%) underwent emergency cesarean section, one patient (14.3%) with twin pregnancy had vaginal delivery with the help of suction cup and forceps, and another patient (14.3%) continued the pregnancy. All patients recovered well after administration of oxygen, diuresis, and other supportive therapy. Conclusion: Atosiban may cause acute pulmonary edema in patients with underlying risk factors. This complication remains rare, but caution during tocolytic treatment using atosiban is recommended

Electromagnetic Shielding and Flame Retardancy of Composite Films Constructed with Cellulose and Graphene Nanoplates

Aimed at improving the electromagnetic (EM) shielding and flame retardancy of cellulose materials, graphene (GE) nanoplates were introduced into cellulose matrix films by blending in1-allyl-3-methylimidazolium chloride. The structure and performance of the obtained composite films were investigated using scanning electron microscopy, X-ray diffraction, thermogravimetric (TG) analysis, EM shielding effectiveness (SE), and combustion tests. GE introduction formed and stacked laminated structures in the films after drying due to controlled shrinkage of the cellulose matrix. The lamination of GE nanoplates into the films was beneficial for providing EM shielding due to multiple internal reflection of EM radiation; furthermore, they also increased flame resistance based on the “labyrinth effect.” The SE of these composite films increased gradually with increased GE content and reached 22.3 dB under an incident frequency of 1500 MHz. TG analysis indicated that these composite films possessed improved thermal stability due to GE addition. Reduced flammability was confirmed by their extended times to ignition or inability to be ignited, reduced heat release rates observed in cone calorimetry tests, and increased limiting oxygen index values. These films with improved EM shielding and flame retardancy could be considered potential candidates for multipurpose materials in various applications, such as electronics and radar evasion