Uneven splitting-ratio 1x2 multimode interference splitters based on silicon wire waveguides

Two types of 1x2 multi-mode interference (MMI) splitters with splitting ratios of 85:15 and 72:28 are designed. On the basis of a numerical simulation, an optimal length of the MMI section is obtained. Subsequently, the devices are fabricated and tested. The footprints of the rectangular MMI regions are only 3x18.2 and 3x14.3 (mu m). The minimum excess losses are 1.4 and 1.1 dB. The results of the test on the splitting ratios are consistent with designed values. The devices can be applied in ultra-compact photonic integrated circuits to realize the "tap" function