Effective thermal conductivity of nanophononic membrane strips investigated by scanning thermal microscopy and Raman thermometry

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Native-oxide limited cross-plane thermal transport in suspended silicon membranes revealed by scanning thermal microscopy

International audienceBy thermally characterizing nanometer-thin suspended silicon membranes with various micrometric lengths in ambient conditions, we determine simultaneously the spatial resolution of our Wollaston-probe scanning thermal microscopy experiment, which probes an area of (285 nm)2, and the effective thermal conductivity of the membranes of 40 W.m-1.K-1. This value is smaller thanthe in-plane thermal conductivity measured using other techniques in vacuum (60 W.m-1.K-1), revealing that both cross-plane and in-plane heat conduction are strongly affected by the native oxide in ambient conditions. This work also underlines that high-thermal conductivity samples can be characterized by scanning thermal microscopy when micro-patterned

Thermal conductivity of Si 2D phononic membranes studied by MD simulations and Raman thermometry

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Comparative thermal characterization of nanophononic membrane strips by Raman thermometry, scanning thermal microscopy, and an electro-thermal method

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Heat conduction in 2D phononic structures

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Thermal Conductivity Reduction in Fully Suspended and Periodically Patterned Membranes Measured by Electro-Thermal Method

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