Preparation of metal glasses by ion implantation and/or sputtering.

NiSn and NiB metallic amorphous films were produced by ion-mixing and cosputter deposition.The present experimental results agree with an atomistic model for glass formation in samples undergoing energetic particle bombardment, based on spike formation and evolution

Elastic properties of sputtered thin films- Influence of different preparation conditions.

none7C.E. Bottani; M. Elena; M. Beghi; G. Ghislotti; L. Guzman; A. Miotello; P.M. OssiBottani, CARLO ENRICO; M., Elena; Beghi, Marco; G., Ghislotti; L., Guzman; A., Miotello; Ossi, PAOLO MARI

Spectroscopic characterization of thermally treated carbon-rich Si1-xCx films.

Amorphous carbon-rich silicon carbide films Si0.45C0.55, deposited on silicon, were obtained by r.f. magnetron sputtering of sintered SiC targets in argon plasma and characterized by means of X-ray photoelectron spectroscopy, Auger electron spectroscopy, Rutherford backscattering spectroscopy and elastic recoil detection analysis. The structural evolution of these films upon thermal annealing at various temperatures in different atmospheres were investigated by means of Raman analysis and IR absorption. The formation of regions of crystallized SiC and diamond-like carbon as well as the hydrogen chemical state evolution are discussed in terms of chemical bondings. The processes of carbon segregation and crystallization of silicon carbide in the films are influenced by (i) high temperature treatments, (ii) annealing atmospheres and (iii) hydrogen dynamical behaviour