98 research outputs found
Déposition assistée par plasma radiofréquence dans un réacteur de grande surface: effets de la contamination particulaire et de la fréquence d'excitation
Negative hydrogenated silicon ion clusters as particle precursors in rf silane plasma deposition experiments
Time-resolved measurements of highly-polymerised negative ions in RF silane plasma deposition experiments
Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: the telegraph effect
In large-area radio-frequency (rf) capacitive reactors, the redistribution of rf current to maintain current continuity near asymmetric sidewalls causes a perturbation in rf plasma potential to propagate along the resistive plasma between capacitive sheaths. The damping length of the perturbation can be determined by a telegraph equation. Experiments are described using a surface array of unbiased electrostatic probes in the ground electrode to verify the theoretical model of the telegraph effect in Howling [J. Appl. Phys. 96, 5429 (2004)]. The measured spatial dependence of the plasma potential rf amplitude and circulating nonambipolar current agree well with two-dimensional numerical solutions of the telegraph equation. The rf plasma potential can be made uniform by using symmetric reactor sidewalls
Degree of dissociation measured by FTIR absorption spectroscopy applied to VHF silane plasmas
- …