Pulsed Laser Deposition of Large‐Area Thin Films and Coatings

Simple and inexpensive methods of obtaining large‐area uniform in thickness and composition thin films on rotating substrates and moving ribbons through pulsed laser deposition have been proposed. Thin films of different compositions were prepared using these methods. The thickness uniformity of obtained films was preserved within the limits of ±3% on up to 300 mm diameter substrates. Also, a method of creating a laser spot with a certain configuration on the target is proposed allowing almost full utilization of the target material