Analysis of MEMS Piezoelectric Hydrophone at High Sensitivity for underwater application

Micro-electromechanical systems (MEMS), is a technology that is used to design small integrated devices that combines both electrical (voltage, resistance) and mechanical components (stress, displacement). These devices are assembled using integrated circuit batch processing methods and their size can vary from Micrometers (μm) to Millimeters (mm). MEMS devices have the capability to sense and control the environment. These devices are fabricated using System Integrated chip technology and micro-level segments are manufactured using silicon. To remove the selective parts of silicon i.e. extra silicon parts, Processes such as back etching, high-aspect-ratio micromachining are used to remove selective parts of silicon or to add the extra layers to form the electromechanical components. The study is concerned to design a T- Shape vector Hydrophone using MEMS Technology and to analyses mechanical properties like induced stresses, deformation and to analyses the piezoelectric hydrophone characteristics like frequency response, sensitivity and Voltage to achieve improved sensitivity. MEMS Directional Hydrophone PZT is simulated. Both the structure resembles the fish lateral line and auditory cilia system which converts acoustic pressure into voltage. © 2017 Elsevier Ltd