EUREKA-Projekt-Euroquip. Teilprojekt: Entwicklung eines kapillaren Beschichtungssystems und prozesstechnische Untersuchungen zur Mikrostrukturtechnologie fuer Flachbildschirme Schlussbericht

For flat panel display production several coating steps with mostly expensive wet coating films are necessary. The coating liquid has to be applied very uniform onto the substrate. The used coating materials are an important cost factor in a flat planel plant. At present common coating method is spinning with the main disadvantage of a high material consumption. Steag MicroTech's patent method of capillary coating, improved by the sponsorship of this project, is able to reduce material consumption and for that reason production cost tool. During sponsorship capillary coating was examined for wet coating processes used for Active Matrix Liquid Crystal Displays. As the main result a substitution of spin technology seems to be possible and successful. Coating uniformities were excellent and comparable with spin coating. To meet customers requirements regarding throughput of 1 substrate per minute with the actual substrat size of 650 x 550 mm, two parallel working capillary coaters are necessary. (orig.)SIGLEAvailable from TIB Hannover: F97B1491+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany); European Union (Euro), Brussels (Belgium)DEGerman