Multifunctional Tool for Expanding AFM-Based Applications

A multifunctional tool which expands the application field of atomic force microscope-based surface modification is presented. The AFM-probe can be used for surface modification and in-situ characterization at the same time, due to a special configuration with two cantilevers. Various applications from different fields are presented, which were carried out with one and the same tool: in-situ characterization of wear generated with and without local lubrication (tribology), fountain-pen lithography in which material is deposited or removed (physical chemistry), and electrochemical metal deposition (electrochemistry)

Low-cost multimode waveguide couplers for multimode fiber-based local area networks

Novel, ultra-compact multimode fiber-matched integrated optical 1×2, 1×3 and 2×2 couplers with low excess losses and large tolerances have been designed and simulated using a fully three-dimensional beam propagation metho

Three dimensional adhesion model for arbitrary rough surfaces

We present a 3D adhesion model based on the JKR theory applied locally for all contacting asperity couple and the calculations account the van der Waals interaction beside the externally applied force. Thus, equilibrium of the system is determined by an extremum in the free total energy and subsequently the contact and the adhesion parameters are computed for that particular position. The model estimates the adhesion of contacting arbitrary rough surfaces taking into account that asperities deform according to one of the three deformation regimes (elastic, elasto-plastic and plastic). The deformation of the contacting asperities is determined by the material properties, the asperity characteristics as well as the surface topography. Results show that even outside the bonding regime the specific bonding energy is still high enough to cause adhesive problems for microstructures

Fabrication of Surface Micromachined AlN Piezoelectric Microstructures and its Potential Apllication to RF Resonators

We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive sputtering. The top Cr layer is used both as a mask to etch the AlN thin films and as an electrode to actuate the AlN piezoelectric layer. The AlN layer is patterned anisotropically by wet etching using a TMAH (25%) solution. This multilayer stack uses silicon-di-oxide as a sacrificial layer to make free-standing structures. One-port scattering paramenter measurement using a network analyzer show a resonant frequency of 1.781 GHz on a clamped-clamped beam suspended structure. The effective electromechanical coupling factor is calculated as 2.4 % and the measured bandwidth is 13.5 MHz for one such a doubly clamped beam (990x30) μm2

Titanium epoxidation catalysts : zeolite and silsesquioxane based materials

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Design and fabrication of 1xN and NxN planar waveguide couplers for multimode fiber-based local area networks.

We report on the design and fabrication of compact and potentially low-cost multimode fiber matched 1 x N and N x N couplers for LAN’s. The design utilizes the self-imaging effect and tapering of the Multi-Mode Interference (MMI) section. An extended mode propagation analysis and 3-D beam propagation method (BPM) were used to analyze and design these structures. The simulations show that the couplers exhibit low excess losses, low power imbalance, and relaxed fabrication tolerances at very short device length. The devices were fabricated in polymer waveguide technology using spin coating, photolithography, and reactive ion etching. Preliminary experimental results show promising characteristics

Fabrication of an active nanostencil with integrated microshutters

An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically

A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators

A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications. Wet anisotropic etching of AlN thin film is used with a Cr metal mask layer in the microfabrication process. Tetra methyl ammonium hydroxide (TMAH) of 25 wt.% solution is used as an etching solution for the AlN thin films. Polysilicon is used as a structural layer. Highly c-axis oriented AlN thin films are deposited by RF reactive sputtering. Thin layers of chromium on either side of the AlN are used as top and bottom electrodes and also as a mask to etch the AlN and polysilicon layers. The fabricated suspended unimorph structures are tested for scattering parameters using a vector network analyzer. Results show resonant frequencies of devices above 1.7 GHz with an effective electromechanical coupling factor, $K^2_{\mathrm eff} \approx 1.7\%