Development and performance demonstration of the NANOMEFOS non-contact measurement machine for freeform optics

This paper shows the machine concept, the realization and the test results of the completed NANOMEFOS non-contact measurement machine for freeform optics. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement

Freeform optics measurements with the NANOMEFOS non-contact measurement machine

The NANOMEFOS non-contact measurement machine for freeform optics has been completed. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement

Development and performance demonstration of the NANOMEFOS non-contact measurement machine for freeform optics

This paper shows the machine concept, the realization and the test results of the completed NANOMEFOS non-contact measurement machine for freeform optics. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement

Development and performance demonstration of the NANOMEFOS non-contact measurement machine for freeform optics

This paper shows the machine concept, the realization and the test results of the completed NANOMEFOS non-contact measurement machine for freeform optics. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement

Nanometer level freeform surface measurements with the NANOMEFOS non-contact measurement machine

TNO, TU/e and NMi VSL have developed the NANOMEFOS measurement machine, This machine is capable of fast, universal and non-contact measurement of freeform optics up to 500 mm diameter, with an uncertainty of 30 nm. The optic is placed on a continuously rotating spindle, while a specially developed long range optical probe is positioned over it by a motion system. A separate metrology system measures probe and product position. Measurements of a tilted flat show a reproducibility of 2-4 nm rms. More complex artifacts are measured, and further calibrations are shown to demonstrate the nanometer level measurement uncertainty