How microalloying of the Al target can improve process and film characteristics of sputtered alumina

The outstanding thermo-mechanical and chemical stability of Al2O3 thin films attracts particular attention in academia and industry. Here we show that alloying of the powder metallurgically prepared Al targets with 2 as well as 5 at.% of Cr, Mo, or W significantly improves the process stability (e.g., reducing arcing events) for Al2O3, allowing their reactive magnetron sputtering in DC mode (substrate temperature was always 360 degrees C). Contrary to these microalloying elements, Nb did not change or improve the process characteristics of the Al target due to the relatively coarse Nb particles (< 125 mu m). Particularly the small (< 10 mu m) and fine-dispersed W particles are very effective in stopping the collision cascades to concentrate them to the near subsurface target-regions. This leads to a shift of the target-poisoning onset from O-2/(Ar + O-2) flow-rate-ratios of about 32 to 52%, specifically when adding 5 at.% to the Al target. Thereby also improved deposition rates are possible. However, detailed X-ray diffraction (XRD) and transmission electron microscopy studies show that only thin films developed from the 2 at.% W alloyed Al target have a nanocrystalline gamma-Al2O3-based structure comparable to those prepared from Al or Cr alloyed Al targets. The films are with 28.3 GPa instead of 26.8 GPa slightly harder when sputtered from Al0.98W0.02 instead of Al targets. Higher W contents (and also Nb) in the target lead to the formation of Al2O3-based films with considerably lower crystalline phase fractions and hardness (similar to 13 GPa). Hardest films, with 30.0 and 29.6 GPa, are obtained when using Al0.98Cr0.02 and Al0.98Cr0.05 targets, respectively. The formation of volatile Mo-oxides during film growth interferes the structure development, leading to rather soft films with 8.0 GPa especially when using the higher Mo alloyed Al0.98Cr0.05 target. Based on our results we can conclude that microalloying the Al targets with small and fine-dispersed Cr or W particles not just improves process stability and deposition rate during reactive sputtering of Al2O3, but also their mechanical thin film properties

Characterization of the deformation behavior of intermediate porosity interconnected Ti foams using micro-computed tomography and direct finite element modeling

Under load-bearing conditions metal-based foam scaffolds are currently the preferred choice as bone/cartilage implants. In this study X-ray micro-computed tomography was used to discretize the three-dimensional structure of a commercial titanium foam used in spinal fusion devices. Direct finite element modeling, continuum micromechanics and analytical models of the foam were employed to characterize the elasto-plastic deformation behavior. These results were validated against experimental measurements, including ultrasound and monotonic and interrupted compression testing. Interrupted compression tests demonstrated localized collapse of pores unfavorably oriented with respect to the loading direction at many isolated locations, unlike the Ashby model, in which pores collapse row by row. A principal component analysis technique was developed to quantify the pore anisotropy which was then related to the yield stress anisotropy, indicating which isolated pores will collapse first. The Gibson Ashby model was extended to incorporate this anisotropy by considering an orthorhombic, rather than a tetragonal, unit cell. It is worth noting that the natural bone is highly anisotropic and there is a need to develop and characterize anisotropic implants that mimic bone characteristics. (C) 2009 Acts Materialia Inc. Published by Elsevier Ltd. All rights reserved