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1 research outputs found
Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device
Author
Bijkerk Frederik
Klein Roman stietz Frank,wedowski Marco,louis Eric,bijkerk Frederik, Yakshin Andrey E
+5Â more
Klein Roman
Louis Eric
Stietz Frank
Wedowski Marco
Yakshin Andrey E
Publication venue
Publication date
12/01/2005
Field of study
No full text
University of Twente Research Information